Used TEL / TOKYO ELECTRON Alpha 808SD #9097854 for sale

TEL / TOKYO ELECTRON Alpha 808SD
ID: 9097854
Wafer Size: 8"
Vintage: 1994
Pyro oxide furnace, 8", 1994 vintage.
TEL / TOKYO ELECTRON Alpha 808SD is an advanced diffusion furnace and accessory that provides superior device performance and reliability. This diffusion furnace features a single-module design, featuring an all-in-one power, thermal, and control equipment, which allows manufacturers to easily integrate into their facility. TEL Alpha 808SD also features a dual-building system organized in two modules, with the first module controlling the heating Rate, temperature uniformity and thermal uniformity while the second module is responsible for executing the recipe-based operation. TOKYO ELECTRON ALPHA 808 SD utilizes a horizontally-loaded, dome-shaped furnaces that are equipped with double sidewalls and internal spacer heating to provide improved thermal uniformity and repeatability. The furnace utilizes an advanced infra-red heating unit and an electro-cleaning machine for superior performance. Due to the dome shape, the furnace is capable of maintaining a large temperature range, between 30-1000 degrees Celsius, for wafer processing. The furnace also comes equipped with built-in double heat shields with closed-loop temperature controller to protect against environmental fluctuations. This diffusion furnace also can accommodate a variety of wafer sizes, up to 8 inch diameter, and can process up to 30 wafers at once. Alpha 808SD includes up to 10 programmable recipes, allowing users to easily customize their thermal processing techniques. The furnace is also able to accurately control temperature gradients and fluctuations, while its uniformity control ensures minimal variations from one side to the other. TEL ALPHA 808 SD is designed and engineered to meet international safety standards and the furnace is also equipped with comprehensive protection features such as an interlock tool, over-temperature detector, emergency warning devices, and auto-shutdown for optimal safety. Its advanced design also includes thermal insulation to minimize losses and reduce energy consumption. TOKYO ELECTRON Alpha 808SD represents a powerful and reliable diffusion furnace and accessory, and is the perfect choice for manufacturers seeking improved production yield, repeatability, and process reliability.
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