Used TEL / TOKYO ELECTRON Alpha 808SDN #9157897 for sale
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ID: 9157897
Wafer Size: 8"
Vintage: 1995
System, 8"
Dry ox
Controller type: TS4000Z
Gas:
N2
O2
Ar
Hcl
150 Wafer/bacth
VMU-40-102EX2
1995 vintage.
TEL / TOKYO ELECTRON Alpha 808SDN is a diffusion furnace and accessories package from one of the largest semiconductor companies in the world. TEL Alpha 808SDN (differentiated from the Alpha 808N model) features a powerful SiH4/H2 multi-gas mixture, a 5000 pph (parts-per-hour) capability, improved uniformity and temperature control over the 808N model, and improved product quality and throughput. With a completely new design, TOKYO ELECTRON ALPHA 808 SDN delivers thermal capabilities that exceed those found in comparable models. TEL / TOKYO ELECTRON ALPHA 808 SDN features a robust chamber design capable of multiple gas mixtures, including SiH4, H2, Ar, N2, NH3, and SF6. This makes it a reliable and powerful choice for diffusion processes. The increased temperature uniformity and increased temperature control capabilities make it suitable for challenging and demanding diffusion processes. The unit is equipped with sophisticated PID control for precisely controlling temperature, allowing it to achieve temperatures up to 1250 °C. ALPHA 808 SDN also features a proprietary automatic end-point detection equipment, allowing for precise control of thermal profile uniformity. TOKYO ELECTRON Alpha 808SDN also includes a range of advanced features and options to ensure a consistent and reliable diffusion process. These include automatic gas mixing, temperature uniformity management, and high level of performance quality assurance. The programs can be customized depending on the customer's needs and requirements, including specific uniformity and process parameters. This makes it easy for users to control the furnace and ensure consistent and optimal diffusion results. Alpha 808SDN diffused furnace comes with a range of accessories, designed to facilitate process efficiency and improve the overall diffusion process. These include a 30 inch long tubular quartz hydro jet, designed to deliver efficient and reliable thermal uniformity in the diffusion process. The accessories also include an advanced high-speed data acquisition system designed to measure and analyze the thermal profiles of the unit. Additionally, the unit can be adapted to accommodate different gas mixtures, preventing contamination and improving machine efficiency. Overall, TEL ALPHA 808 SDN is a robust and efficient diffusion furnace with a range of high-performance features. From software control to advanced accessories, TEL / TOKYO ELECTRON Alpha 808SDN provides a reliable and efficient platform to carry out diffusion processes with precise control and high-quality results.
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