Used TEL / TOKYO ELECTRON Alpha 81-ZA #9092846 for sale
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ID: 9092846
Wafer Size: 8"
Furnace, 8"
Process capability: Pyro
Zones: 5
Process gases: N2, H2, O2, DCE
Controller model: TS4000
Accessories: Atmospheric system, loadsize, 100, VMU heater
CE mark: Yes.
TEL / TOKYO ELECTRON Alpha 81-ZA is a diffusion furnace and accessories for enabling precise control of dopant and temperature profiles for precise thermoelectric deposits. This diffusion furnace delivers process temperatures up to 1050 °C and provides both multi-zone and rapid ramp up/down capability for improved uniformity. It also features thermal decomposition technology for improved process uniformity and process flexibility. TEL Alpha 81-ZA equipment is constructed with a furnace zone and a controller, along with a number of accessories. The furnace zone consists of a vertical quartz tube (or tube boat) and an alumina top-loading hearth. This facilitates horizontal convection cooling for improved uniformity and rapid processing. The furnace is also equipped with a quartz liner and asbestos insulation for improved process efficiency and safety. The system controller is user-friendly with large graphical icons to guide the user through menus and processes. This allows the user to accurately control pressure, temperature, heating rate and other functions. The controller is also equipped with accurate sensors and thermocouple probes to help ensure precise temperature measurement and control. TOKYO ELECTRON Alpha 81-ZA unit also includes a number of other accessories to facilitate efficient and precise processing. These include push footlifters, quartz crucibles, wafer carriers, diffusion bell jars, spacing bars, vacuum ports, and a water-cooled electrode. All of these work together to provide a safe and efficient diffusion process. Overall, Alpha 81-ZA is an advanced diffusion furnace and accessories machine for accurately controlled processing. It offers temperature up to 1050°C with multi-zone accuracy and superior process uniformity. The user-friendly controller and various accessories also provide precise control, convenience, and safety. This tool is ideal for any application that requires precise thermoelectric deposition.
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