Used TEL / TOKYO ELECTRON Alpha 81-ZA #9092848 for sale
URL successfully copied!
ID: 9092848
Wafer Size: 8"
Furnace, 8"
Process capability: Pyro
Zones: 5
Process gases: N2, H2, O2, DCE
Controller model: TS4000
Accessories: Atmospheric system, loadsize, 100, VMU heater
CE mark: Yes.
TEL / TOKYO ELECTRON Alpha 81-ZA is a state-of-the-art diffusion furnace and accessories designed for the production of high purity semiconductor materials, such as single crystalline silicon (Si) and other compound materials, for use in microelectronic components. This high-performance equipment is driven by advanced technology such as a fast and effective micro-management module, an ultra-high resolution imaging system, and extreme temperature stability. The fast and effective micro-management module, also known as the process control module, enables process engineers to program and manage the furnace's entire temperature and pressure parameters with precision. This module makes it possible to not only closely monitor all parameters and conditions of the furnace process, but also to quickly and easily diagnose, evaluate, and correct the problem in real-time. The ultra-high resolution imaging unit installed within the device allows for a detailed measurement of the components as small as 0.1 micron (1/100th of a millimeter). The extreme temperature stability further reinforces the furnace's performance; it is accurate and consistent for temperatures ranging between 10 and 2000 degrees Celsius. TEL Alpha 81-ZA diffusion furnace also has an ergonomic design in that its components such as the door, the front access panel, and the safety door are all located at the lower part of the machine; this makes it easy to access the interior of the device. Additionally, the efficient space utilization in the interior of the diffusion furnace allows for the filling of parts and components with greater speed and accuracy. It is also noteworthy that the diffusion process is easily automated. Using TEL/Tokyo Alpha Series software, up to 16 recipes may be stored in the memory bank for quick reference and modifications. This makes it easy to develop process recipes, supporting the design and production of advanced semiconductor devices. Finally, TOKYO ELECTRON Alpha 81-ZA diffusion furnace is certified with a wide range of safety measures, both detailed monitoring and automated. This ensures that the tool is safe to use and provides a comfortable and secure environment for production of semiconductor materials. In summary, Alpha 81-ZA is an advanced and reliable diffusion furnace and accessories designed with precision, accuracy, professionalism, and safety in mind. It combines several high-tech features such as ultra-high resolution, temperature stability, and automated process control into one comprehensive asset that meets industry-standard requirements, making it an ideal solution for modern semiconductor device production.
There are no reviews yet