Used TEL / TOKYO ELECTRON Alpha 81-ZAN #9092857 for sale
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ID: 9092857
Wafer Size: 8"
Furnace, 8"
Process capability: Pyro
Zones: 5
Process gases: N2, H2, O2, DCE
Controller model: TS4000
Accessories: Atmospheric system, loadsize, 100, VMU heater
CE mark: Yes.
TEL / TOKYO ELECTRON Alpha 81-ZAN is a sophisticated diffusion furnace and accessories set used for semiconductor processing applications. It features sophisticated multi-zone temperature controls with thermal cycling options, allowing for precision process parameters for ultra-high yield and top-tier quality output. The precision created by TEL Alpha 81-ZAN allows for processes such as layer transfer, high-temperature oxidizing processes, nitride processing, and vapor deposition processes to be performed with consistently high efficiency. TOKYO ELECTRON Alpha 81-ZAN includes a directional-type, multi-chamber vacuum diffusion furnace and a equipment of hardware and software components which provide a complete set of tools for preparing and controlling the various diffusion processes. The process chamber is constructed with high-grade stainless steel and includes a heating coil system with two independent temperature zones which allows for different rates of diffusion. An advanced kelvin-based temperature control unit allows for regulation of the process parameters for greater accuracy and repeatability. The machine also includes an Automatic Tool Controller (ASC) which allows for continuous monitoring of the power levels and temperature control settings. The ASC also incorporates the RS485 remote diagnostics capability which allows user to access historic data logs, as well as perform process optimization and troubleshooting. The asset also includes a Variable Pressure Emission Control Device (VPECD) which allows for creating accurate pressure within the process chamber for a wide range of applications. For safety and long-term reliability, Alpha 81-ZAN is equipped with a temperature safety monitor and an interlock model for controlling the gas flow. To reduce maintenance and downtime, the equipment is designed with an ergonomically optimized housing and an integrated LED display for easy monitoring and diagnostics. The unit also comes complete with a set of sample-holding supplies, including quartz tubes, caps, and coolers. In summary, TEL / TOKYO ELECTRON Alpha 81-ZAN is an advanced diffusion furnace and accessories set designed for premier-level semiconductor processing capability. It offers numerous features to allow for superior temperature control and accurate process parameters, as well as the necessary hardware and software tools for monitoring and optimizing the system. With its combination of safety and reliability features, TEL Alpha 81-ZAN is the perfect choice for a wide range of demanding application in the technology and electronics industries.
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