Used TEL / TOKYO ELECTRON Alpha 8S-Z #293636549 for sale

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ID: 293636549
Wafer Size: 8"
Vintage: 2001
Vertical LPCVD furnace, 8" CIM: SECS, GEM Fast thermo oxidation process Stocker Wafer transfer system SMIF RCU System 2001 vintage.
TEL / TOKYO ELECTRON Alpha 8S-Z is a diffusion furnace and accessories specifically designed to improve processes in semiconductor research and technology. This diffusion furnace is a high-specification, high-performance diffusion furnace with a total thermal budget of up to 200kw and a maximum equipment temperature of 1300℃. It features outstanding process uniformity, temperature accuracy and control, emphasizing practicality. TEL ALPHA 8SZ features a double-walled furnace combined with a horizontal susceptor for improved temperature uniformity and loading. It also offers extensive co-processing capabilities, capable of up to four simultaneous processes that are uniformly maintained and made compatible with various process control systems. This diffusion furnace's thermal supplies are coupled with an efficient post-matrix ashing system, featuring optional slidable furnace, pre-sterilizing protocols, and single door options. The formidable accuracy and refrigeration capabilities of this diffusion furnace are provided by a multi-step, variable drive engine. This innovation improves accuracy, increases process uniformity, and ensures stability and efficient cooling and heating rates. In addition, the heater element is a two-band gap that is lined with molybdenum disilicide, offering higher reliability and faster ramping. TOKYO ELECTRON ALPHA 8 S-Z is also prepared with a built-in mapping unit for better machine control and features an oxidation protection tool for improved protection of healers and parts. The temperature stability of this diffusion furnace is improved by a vacuum-sealing asset and an air-cleaning function that prevents airborne contaminants from entering the interior chamber. TEL / TOKYO ELECTRON ALPHA 8SZ's robust control systems help users monitor and record process data with exact precision. It features an intuitive graphic display and a large disc, allowing for easy inspection, focused and uniform processes, and energy cost savings. Furthermore, the installation is designed for a minimalistic operational setup, cutting both installation space and energy costs. Overall, ALPHA 8SZ is a versatile diffusion furnace, offering high precision and a variety of features and amenities, perfect for semiconductor research and technology. This diffusion furnace and its associated accessories provide streamlined processes, increased efficiency, and advanced reliability.
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