Used TEL / TOKYO ELECTRON Alpha 8S-Z #293636590 for sale
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ID: 293636590
Wafer Size: 8"
Vintage: 1998
Diffusion furnace, 8"
Process: HT02
SMIF Interface
1998 vintage.
TEL / TOKYO ELECTRON Alpha 8S-Z is a diffusion furnace and its associated accessories used in various semiconductor and optical processes. It is capable of applying thermal processing to semiconductor wafers and other semiconductor devices at a low temperature of about 200 degrees Celsius up to a maximum temperature of 1200 degrees Celsius. The structure of TEL ALPHA 8SZ includes a loop-loading equipment, split-tube furnace, temperature controller, and exhaust system. It also includes a low-oxygen environment, which allows for successful oxide diffusion. The loop-loading unit within TOKYO ELECTRON ALPHA 8 S-Z facilitates automated wafer-load and unload efficiently. This machine is equipped with a special air-handling technology to help keep the wafers cool while they transfer in and out of the furnace. The split-tube furnace is an ISO-certified diffusion furnace that is capable of tempering both the top and bottom sides of a wafer. The temperature controller is the tool used to regulate and maintain the desired temperature of the diffusion process. In addition to being used for applying thermal processing, TOKYO ELECTRON ALPHA 8 S Z has features to assist with other activities. For example, it has a special exhaust asset to reduce smoke and other byproducts while in operation. ALPHA 8 S Z is also equipped with an in-situ thermogravimetric analysis (TGA) capability, which allows for real-time measurement of the weight loss. Furthermore, TOKYO ELECTRON ALPHA 8SZ includes an automated atmosphere control model for obtaining constant and stable temperature, oxygen, and ozone concentration. This helps to ensure desired process conditions over different diffusion processes. This diffusion furnace is powered by four powers sources and it has a small footprint size, making it suitable for a variety of applications. Overall, Alpha 8S-Z is a reliable and efficient diffusion furnace that comes with all the necessary accessories to make semiconductor processes quick, efficient, and effective. This diffusion furnace is ideal for both commercial and industrial applications.
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