Used TEL / TOKYO ELECTRON Alpha 8S-Z #293638474 for sale
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ID: 293638474
Wafer Size: 8"
Vintage: 2001
Diffusion furnace, 8"
CIM: SECS, GEM
Wafer transfer system
(2) SMIF
Gas utility cabinet
RCU System
Fast thermo oxidation process
CIM: SECS, GEM
Power unit
2001 vintage.
TEL / TOKYO ELECTRON Alpha 8S-Z is a diffusion furnace and accessories produced by TEL (TOKYO ELECTRON). It is designed for various applications related to the process of surface diffusion. It is a powerful tool for semiconductor manufacturing and can be used for various semiconductor processes including thermal oxidation, diffusion, evaporation, coating, and laser annealing. TEL ALPHA 8SZ diffusion furnace can be used to create an optimal temperature environment for the diffusion process. The furnace is equipped with two high temperature ovens, which can reach up to a maximum temperature of 1200° C. The precise temperature and air flow control allow for a wide range of substrate heating and cooling requirements, making TOKYO ELECTRON ALPHA 8 S-Z suitable for a variety of processes, from photomask patterning to oxidation and annealing. The furnace further includes an optional low temperature chamber, allowing for processing of temperature-sensitive materials. This chamber can handle temperatures down to -10° C and can be used for laser-annealing processes, as well as for liquid phase epitaxy (LPE). TEL ALPHA 8 S Z diffusion furnace is designed with a user-friendly interface, allowing it to be operated easily and safely. The intuitive control panel can be used to set temperatures up to 800° C and monitor the furnace's condition. The graphical display simplifies the navigation of settings and programs, and provides warnings and fault status. Additional features of ALPHA 8SZ include a number of safety features, such as a gas shut-off switch, over-temperature protection, and a liquid nitrogen cooling system for safely handling high temperatures and pressure. The furnace is also compatible with a variety of measuring instruments, including 4-port vacuum systems, for efficient operation. TEL Alpha 8S-Z diffusion furnace is an indispensable tool for semiconductor device fabrication and processing. Its advanced temperature control, safety features, and versatile range of uses make it an ideal tool for the modern semiconductor industry.
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