Used TEL / TOKYO ELECTRON Alpha 8S-Z #293642584 for sale
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ID: 293642584
Wafer Size: 8"
Vintage: 1996
Furnace, 8"
Process: Pyro
Wafer: Flat zone type
Gases configuration:
Gas supply:
Gas name / Pressure / Connection method / Unit
PN2 / 0.2 Mpa / 1/4" UJR / Utility box
O2 / 0.15 Mpa / 1/4" UJR / Utility box
H2 / 0.15 Mpa / 1/4" UJR / Utility box
Exhaust:
Type of Exhaust / Flow rate
Scavenger exhaust / 3 m³/min
Process exhaust / 1 m³/min
Gas room exhaust / 1 m³/min
Cooling water:
Gas name / Pressure / Flow rate / Connection method / Used for
Furnace unit / 5 Kg/cm² / 15 / 3/4" SWG / Heater, flange
Power supply:
UPS: AC 120 V, Single Phase, 5 kW (Controller)
Power: 208 V, 3 Phase, 30 kW (Heater chamber)
1996 vintage.
TEL / TOKYO ELECTRON Alpha 8S-Z is a diffusion furnace and associated accessories designed for use in semiconductor research and production. It is capable of high temperatures of up to 1000°C, enabling substrates to be used in advanced processes such as vapor deposition. The 8S-Z includes an advanced reaction chamber design, allowing for optimal gas flow and temperature uniformity. The 8S-Z is perfect for advanced research in a variety of fields such as integrated circuit production, micro-fabrication, MEMS, and more. It offers superior performance in fast annealing and low-temperature doping. The 8S-Z features a five-level control of the reaction chamber pressure, enabling precise control of the process parameters. It has a top-loading door that allows users to easily load substrates directly into the main chamber. TEL ALPHA 8SZ offers a comprehensive set of accessories that users can employ depending on their needs. These include a Transfer Loader, Shuttles and Baskets, and a Cooler Quench assembly featuring a special fan and cold-air equipment. This enables the furnace to remain cool during processing, preventing damage to the system, the substrate, and the user's equipment. The 8S-Z also offers a Level-II Computer Control Unit (CCS). This machine enables users to monitor and program the furnace parameters with great precision. It also includes safety features that automatically shut off the furnace if abnormal conditions are detected. Overall, TOKYO ELECTRON ALPHA 8 S-Z is a mid-range diffusion furnace featuring excellent temperature control and uniformity, as well as reliable safety features. It has a variety of accessories that make it perfect for advanced research in semiconductor production, micro-fabrication, and other fields.
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