Used TEL / TOKYO ELECTRON Alpha 8S-Z #293704451 for sale
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TEL / TOKYO ELECTRON Alpha 8S-Z is a diffusion furnace and accessory designed to precisely control the temperature in the diffusion process to safely and accurately manufacture semiconductors. This equipment is ideal for semiconductor processing, thin film deposition and annealing applications. It has a thermally isolated process tube, an interface control unit, and an integrated advanced optical temperature measurement equipment. The interface control unit has four independently programmable programs for a variety of processes and also monitors the status of the furnace. The integrated advanced optical temperature measurement system is able to measure the temperature of the process tube with a high level of accuracy and can be programmed to adjust the temperature of the furnace based on the readings. TEL ALPHA 8SZ is capable of operating at up to 1350°C, uses a two-stage quartz tube and is equipped with an alumina insulation plate. This heat retention plate is able to maintain heat among the sample wafers and to keep the tube from over-heating which can then create an undesirable situation. TOKYO ELECTRON ALPHA 8 S-Z unit also has multi-zone capability, up to six control zones, and up to 14 wafer sources. It is designed to have a manual lockout feature, which prevents access to the process chamber in case of an emergency. It also has some advanced features such as a closed-loop control machine, temperature ramp-up timer, and power failure protection. The closed-loop control tool works in conjunction with the furnace controller and helps to regulate its temperature according to the recipe's programmed profile. The temperature ramp-up timer helps to set the maximum temperature setting at which the process should proceed. Lastly, the power failure protection helps to ensure that the furnace continues to operate in the event of a power disruption. Alpha 8S-Z is an easy-to-operate asset and has an easy-to-read display. It is also equipped with an intuitive control model for easily controlling each process. The control application allows users to set up different levels of control and enables them to monitor the process step-by-step. The equipment is also very reliable and has a wide range of safety functions to protect the system from damage.
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