Used TEL / TOKYO ELECTRON Alpha 8S-Z #293704452 for sale
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TEL / TOKYO ELECTRON Alpha 8S-Z is a purpose built diffusion furnace intended for processing wafers. It is designed to achieve the highest levels of productivity, with a low impact on power saving while ensuring an excellent level of process control and uniformity. The 8S-Z offers a powerful source of heat and an optimal atmosphere for the cleansing process of oxide-oxide film, thin oxide film, polysilicon etching, nitride processing, and other related materials. The machine is equipped with a quartz pipe with a length of 1.8 meters and a width of 0.3 meters, which is fitted with the hot zone for 8S-Z. The isolation walls in this hot zone offer a temperature range with a maximum of 1250 degrees Celsius. The machine is also fitted with TEL-ATOS, a proprietary software which controls the temperatures within the hot zone as well as the thermocouple at the bottom of the quartz pipe. This ensures a uniform and repeatable diffusion process. The machine is also fitted with three independent heaters, which are self-calibrating. It can effectively control the temperature of the hot zone over a larger surface area and ensures uniformity of the diffusion process. The machine also designed with an improved auto-offset mechanism, reducing the offset time while allowing more time to focus on the process. Its C-type structure allows wi th improved uniformity at increased pressure capability as well as improved access, allowing for rapid and accurate thin film processes. The 8S-Z also has an integrated Automation and Monitoring Equipment (AMS), which allows for the efficient control of multiple machines with the same control system. This helps maximize efficiency and throughput in the diffusion process. This unit allows for an alarm based reporting of process status. The machine can also detect any abnormal conditions and send an alert to the operator. The 8S-Z is also equipped with preventive maintenance and data logging capabilities, which help reduce downtime as well as ensure efficient process control. This makes the machine easy to maintain, and it can accurately monitor and detect any potential problems. The 8S-Z also features a double-walled frame for improved thermal insulation. This reduces power consumption, while providing rigid-body support and secure operation. This feature also helps reduce noise and vibration levels, making it more comfortable to use the machine. Overall, TEL ALPHA 8SZ is a state-of-the-art diffusion furnace that can effectively handle all types of wafer processing tasks. It is highly reliable, with integrated control systems and a multitude of features that provide optimal process control and uniformity.
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