Used TEL / TOKYO ELECTRON Alpha 8S-Z #293759914 for sale

ID: 293759914
Wafer Size: 8"
Vintage: 1998
Furnace, 8" Process: LPCVD- POLY CIM: SECS / GEM (2) SMIFs Does not include Quartz 1998 vintage.
TEL / TOKYO ELECTRON Alpha 8S-Z is a diffusion furnace and accessorie used to manufacture highly advanced integrated circuits (ICs). With an integrated top-loading robot, TEL ALPHA 8SZ is designed for rapid and precise wafer loading and unloading. This efficient tool increases throughput and reduces the likelihood of contamination and disruption. TOKYO ELECTRON ALPHA 8 S-Z provides flexible capacity for future IC development, as it is equipped with lower and upper heating furnaces for improved temperature uniformity. The diffusion furnace itself is built with advanced technology, including precision heaters, an Energy Regenerating Equipment (ERS), and differential thermal flow control. The ERS system is designed to reduce power consumption and increase energy efficiency, while the differential thermal flow control unit delivers a more even heating and cooling of the wafer to lessen non-uniformity and increase throughput. ALPHA 8 S-Z also features multi-gas injection capability, allowing for the integration of various gases. These gases can be injected to a wide range of temperatures and can be brought in from multiple points to enhance the uniformity of the diffusion process. The temperature uniformity has also been improved by a uniform gas-flow machine, which ensures that gases are delivered evenly and without any flapping or turbulence. Lastly, TEL / TOKYO ELECTRON ALPHA 8 S Z has a 350mm wafer handling tool which combines mechanical and pneumatic handling. The mechanical-and-pneumatic handling asset minimizes vibration caused by wafer loading/unloading, thus reducing distortion which might otherwise occur during the substrate transfer step. Another benefit of the handling model is that it allows for optimal material output treatment. In short, ALPHA 8SZ is a diffusion furnace and accessorie that provides superior performance, precise temperature levels, and improved gas injection for the highest level of efficiency in high throughput IC manufacture. The superior temperature uniformity, improved gas injection, and advanced motion control of TOKYO ELECTRON Alpha 8S-Z make it the ideal tool for semiconductor device manufacturers looking to produce the most advanced integrated circuits.
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