Used TEL / TOKYO ELECTRON Alpha 8S-Z #9281895 for sale

ID: 9281895
Furnace.
TEL / TOKYO ELECTRON Alpha 8S-Z is a diffusion furnace and accessory designed to provide reliable, long-lasting service in a wide range of semiconductor device fabrication processes. This diffusion furnace is a compact equipment which is highly efficient and easy to program, with a user-friendly 8" LCD touch panel display. The 8S-Z model features pulse clean and single-wafer functions, as well as highly precise temperature control mechanisms for various heating control processes. TEL ALPHA 8SZ offers a unique processor and powerful mass flow controller that precisely controls the gas flow rate, providing excellent repeatability and product quality. This model is equipped with various external input and output signals for setting clean recipes and maintaining efficient communication with other systems. The system also features an automatic monitoring unit with real-time data logging to enable fast and accurate machine diagnostics, enabling quick resolution of issues and reducing downtime. TOKYO ELECTRON ALPHA 8 S-Z also offers a CFC-free stainless steel, dual lid construction to increase durability and ensure a clean work environment. Optimal airtightness is maintained to reduce air leakage, enabling high temperature uniformity and product quality. Its low-maintenance design and construction makes it highly cost-effective, while advanced environmental protection measures allow the tool to operate in compliance with SEMI S2 and other safety standards. This diffusion furnace and accessory is equipped with a vacuum pump and nitrogen purge to ensure an inert, oxygen-free environment. Its high-quality hood materials are especially designed to prevent oxidation, meeting the demands of many compliance schemes. The 8S-Z also provides water-cooled jigs for loading and unloading wafers and cassettes, enabling short loading time and accurate temperature control of semiconductor components. ALPHA 8 S Z also offers extended maintenance of parts and a high-performance design for utmost reliability and tolerance of high usage cycles. It is designed to run 24/7 with a low noise level and energy-saving operation to help reduce resources and environmental impact. Plus, its advanced linear heat-up feature maintains superior temperature control over wide measurement ranges with excellent repeatability. This diffusion furnace and accessory is designed to provide superior performance in numerous fabrication processes.
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