Used TEL / TOKYO ELECTRON Alpha 8S-Z #9281900 for sale

TEL / TOKYO ELECTRON Alpha 8S-Z is an advanced tool offering high-performance diffusion and oxidation furnaces for a variety of applications, such as semiconductor device fabrication. The furnace has an inner chamber surrounded by a high-vacuum chamber and is able to reach a maximum temperature of 2500°C. It is equipped with a plasma source, an exhaust gas device, and a zero-air leak equipment. The furnace has an 8-zone control capability with an in situ adjustable power setting for each zone, allowing for uniform or selective processing. It is also equipped with loader and unloader for wafers and an 8-pocket distributor for automatic loading and unloading. TEL ALPHA 8SZ diffusion furnace also includes a variety of accessories that enable it to perform different types of processes, such as PECVD (plasma enhanced chemical vapor deposition), sputtering, and epitaxial growth. These accessories include a pre-treatment chamber that can be used for cleaning, pre-heating, annealing, and other thermal treatments, as well as a cooling chamber for reducing the wafer to room temperature after processing. It also has a wafer probe with a temperature sensor for controlling uniformity. TOKYO ELECTRON ALPHA 8 S-Z is designed with a high degree of safety, as it is equipped with a thermal limit switch and a gas shutoff valve to prevent damage if the temperature exceeds the set level. It also has radiation and flame protection capabilities. The furnace is also built with a high degree of accuracy, as it utilizes over temperature sensors to monitor chamber temperature for uniformity and an atmospheric pressure gauge to regulate gas pressure. The system has integrated unit control center software for monitoring the parameters of the process. Alpha 8S-Z is a powerful and reliable machine designed to meet the needs of advanced diffusion and oxidation approaches and is user-friendly, with intuitive software and a variety of safety features. It is an ideal choice for producing high quality with a variety of applications.