Used TEL / TOKYO ELECTRON Alpha 8S #293607761 for sale

TEL / TOKYO ELECTRON Alpha 8S is a diffusion furnace & accessories designed to process various types of up-to 300mm wafers and related components with high through-put performance. The machine provides high-capacity controlling, cooling and processing capabilities. It encompasses a variety of features such as an internal gate valve for wafer transport, a diffusion and annealing chamber, and a pyrometry equipment for precise monitoring and temperature control. TEL ALPHA-8S features a 1200 Series-A gas control system, which is integrated to the diffusion chamber for precise temperature and gas control for high through-put, repeatability and stability. The machine is equipped with a multi-tasking interface for efficient job integration of up to 8 substrate types, eight job types, and eight wafer holder sizes. TOKYO ELECTRON ALPHA 8 S pre-heat pump gives accurate oxide growth control, and five evaporator stick valves give power ramping and power control stability. The pressure monitoring capability allows up to 200 torr pressure control over a wide range of parts, to achieve optimum doping depth. In addition, the encapsulated cOOLPOD provides improved repeatability of temperature profiles. TEL Alpha 8S finely-tuned dry pump unit allows throughput of 300 substrates per hour, and its interface to the Ewafer Applications Suite allows software control and remote diagnostics. The machine is also equipped with a full-faced door to provide uniform heat distribution within the chamber, and is certified to run a variety of substrates, with the option to install additional wafer holders, as needed. The integrated pyrometry machine is designed to detect shifts in temperature, enable precision process and ensure repeatability over a wide range of substrates. The built-in data recording feature allows for easy data capture for efficient process development. Its automation is designed to be flexible, thus allowing for optimized wafer process recipe creation and full wafer tracking. Overall, TEL / TOKYO ELECTRON ALPHA-8 S provides a highly efficient tool to handle large quantities of up-to 300mm substrates. By combining features such as an integrated gas control asset, efficient job integration and automation, accurate pyrometry and dry pump systems, and effective data capture and tracking, Alpha 8S provides an optimal solution for a variety of diffusion processing and annealing applications.