Used TEL / TOKYO ELECTRON Alpha 8S #293754614 for sale

ID: 293754614
Furnace.
TEL / TOKYO ELECTRON Alpha 8S is a high-performance diffusion furnace and accessory designed to provide high-precision, efficient and reliable doping to the semiconductor manufacturing industry. It features a vertical-load structure, unique power-saving OXGATE drive equipment and advanced temperature control system for improved temperature uniformity. TEL ALPHA-8S furnace consists of a quartz crucible and a two-deck gas flow control unit for accurate chemical delivery. It utilizes a water-cooled evaporator to minimize evaporation rates, and is capable of extremely high temperature uniformity over the entire wafer surface. The upper deck features a paddle loading station and a variable angle/multi-position shutter assembly for precise shutter control. The lower deck furnaces are also equipped with an OXGATE focusing coil to achieve high-precision doping. TOKYO ELECTRON ALPHA 8 S provides superior temperature uniformity, enabling precision doping over large wafer areas. Additionally, it offers the capability to efficiently run split lot process uniformity tests, allowing improved capability matching of various slit widths and wafer sizes. TEL ALPHA-8 S also provides excellent testing efficiency. It is designed to minimize down time and maximize reproducibility, allowing improved accuracy in production lot validation and achieving higher yields. The incorporation of a patented pulse running machine reduces programming complexity, reducing cycle times and improving overall productivity. Additionally, its advanced temperature control tool utilizes an embedded temperature sensor to ensure efficient operation. Overall, ALPHA-8 S offers a highly advanced and reliable doping solution for the semiconductor industry. It is capable of providing high-precision temperature control and uniformity for improved asset stability and yields. With its power-saving OXGATE drive model, variable-angle/multi-position shutters and pulse running equipment for enhanced productivity, Alpha 8S is capable of achieving superior quality results.
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