Used TEL / TOKYO ELECTRON Alpha 8S #293769731 for sale

TEL / TOKYO ELECTRON Alpha 8S is a state-of-the-art diffusion furnace and its associated accessories, designed for high-precision applications in the semiconductor and electronics industries. It offers excellent temperature resolution with a quick recovery time, enabling short cycle times and higher throughput. TEL ALPHA-8S is equipped with a removable quartz heating block that can be used with high-temperature wafers, eliminating the need for multiple fixturing. The high-temperature capability of this furnace also allows for rapid thermal processing of materials like polysilicon and silicon-germanium. The heating block of TOKYO ELECTRON ALPHA 8 S is independently controlled and has a built-in thermoelectric cooler, allowing for precise control of the temperature profile. A graphite susceptor with a quartz liner is used to provide a uniform heating surface and a long life, while a removable quartz shield protects the wafer public from thermal radiation. TOKYO ELECTRON Alpha 8S also includes a pyrometer, allowing for temperature monitoring even outside of the temperature range of the heating block. ALPHA-8 S is designed for excellent uniformity throughout the furnace chamber. A three-point temperature compensation equipment ensures excellent temperature uniformity across the entire chamber with a maximum variation of less than 1°C. A multi-slot turntable eliminates the need to manually rotate the wafer, and a multi-slice system allows for easy loading and removal of multiple wafers. In addition, Alpha 8S is equipped with a vacuum evacuation unit that provides excellent temperature uniformity throughout the entire process. The chamber also comes with a nitrogen purge machine to seal the wafer during heating processes. This allows for efficient and reproducible wafer processing with low diffusion losses. Finally, TEL ALPHA-8 S includes comprehensive software support, allowing users to create recipe parameters to suit their specific needs. This software makes programming and operation of the furnace straightforward and easy, while allowing advanced users to tinker with the parameters to get the most out of the tool. All in all, TEL Alpha 8S is an excellent choice of diffusion furnace for precision applications in the semiconductor and electronics industries.