Used TEL / TOKYO ELECTRON Alpha 8S #293770344 for sale

ID: 293770344
Vintage: 1996
Furnace 1996 vintage.
TEL / TOKYO ELECTRON Alpha 8S is a premium diffusion furnace and accessories package, used for various semiconductor manufacturing applications. The main components of the furnace included a vertical furnace tube, an adjustable powder tower and two sets of injectors. The furnace tube is designed with an ow evacuated bottom section chamber and is capable of running wafers or chips up to 300mm. The adjustable powder tower has a built-in drive motor for precise adjustments and enables the deposition of overlying oxide layers. The injectors allow for thicker oxide layers to be deposited in a more uniform fashion, with precise aspect ratio control. An additional feature of TEL ALPHA-8S is its integrated heater, used to quickly and accurately heat up the wafers or chips prior to oxidation. The integrated control system that comes with TOKYO ELECTRON ALPHA 8 S is capable of precise gas flow optimization, as well as wafer cleaning, preheating and cooling. The control system offers 24 temperature zones, each with its own dedicated programmable PID controller, as well as real-time data visualization, real-time alarm monitoring and a cloud-based data library. TEL / TOKYO ELECTRON ALPHA-8S also includes various accessory tools for substrate preparation, such as cryogenic neutron deposition, annealing, lithography and non-contact particle scrubbing. Additionally, the accessory tools provide extended support for advanced metrology techniques, including infrared scanning, spectroscopy and optical imaging. In conclusion, TOKYO ELECTRON Alpha 8S is a high performance diffusion furnace for semiconductor fabrication and is designed for precise control over temperature, gas flow, particle uniformity and substrate cleanliness. It comes with comprehensive accessory tools for precision process control, as well as integrated control systems for real-time data acquisition and wafer cleaning.
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