Used TEL / TOKYO ELECTRON Alpha 8S #293794213 for sale

TEL / TOKYO ELECTRON Alpha 8S
ID: 293794213
Furnace Process: TEOS.
TEL / TOKYO ELECTRON Alpha 8S Diffusion Furnace is a powerful, cost-effective thermal process solution designed to meet the needs of advanced semiconductor device manufacturing. This single-chamber vertical furnace provides enhanced production capacity and improved yield in a space-saving design. The flexibility of TEL ALPHA-8S is achieved with automatic wafer transfer, precision control of temperature, pressure and atmosphere, and integration of advanced process control systems. TOKYO ELECTRON ALPHA 8 S delivers high-accuracy gas combined-pressure control, enhanced throughput with its six-chamber bottom-up fab architecture, and reduced particle contamination, thanks to its internal clean tube. Gas combined-pressure control is important in the fabrication of advanced microelectronics and enables TEL Alpha 8S to provide precise temperature and pressure control throughout the entire diffusion process. In addition, TEL / TOKYO ELECTRON ALPHA-8S includes a powerful process controller, eliminating the need for off-site software control and enabling process optimization on the fly. TOKYO ELECTRON ALPHA-8S also offers advanced safety features and is designed to meet or exceed all safety standards. This includes an overpressure safety equipment, including an automatic shutoff system that activates if the pressure or temperature exceeds preprogrammed safety limits. The unit also includes an emergency vent opening to ensure that pressure is relieved quickly and safely in the event of an emergency. Furthermore, TEL / TOKYO ELECTRON ALPHA 8 S features a variety of accessories to improve performance and maximize efficiency. These include a vacuum machine, an inert gas introduction tool, an inert gas exhaust and recovery asset, load lock vacuum support, cargo chambers, and monitoring and control systems. An automated wafer handling model is compatible with TEL ALPHA-8 S, enabling improved control of lot sizes, throughput, and integration of additional equipment. ALPHA-8S also has an optional thermal cooling stage, allowing the temperature of the wafers to be quickly lowered during rapid advances in thermal processing. With its advanced safety features, precise control, and powerful process control systems, ALPHA 8 S Diffusion Furnace is an ideal solution for the highly demanding semiconductor device manufacturing industry. TOKYO ELECTRON ALPHA-8 S is cost-effective, space-saving, and provides enhanced production capacity and improved yield.
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