Used TEL / TOKYO ELECTRON Alpha 8S #293794330 for sale

TEL / TOKYO ELECTRON Alpha 8S (TEL ALPHA-8S) is a diffusion furnace and auxiliary equipment that can be used for wafer fabrication and assembly. Its design utilizes a vertical downder direct drive system to achieve low thermal distortion and improved control. TOKYO ELECTRON ALPHA 8 S includes variable frequency drive for precise temperature control, allowing for greater accuracy and repeatability when changing furnace settings. The furnace is also equipped with a standard exhaust gas flow meter, allowing for the optimization of gas throughput for improved process consistency and uniformity. TEL Alpha 8S supports a variety of thermal processes, including diffusion, oxidation, nitridization, and low-temperature annealing. To ensure uniform wafer heating, the furnace is equipped with a mechanized crucible and stage rotation system, as well as top and bottom quartz lamps. Crucible rotation is done via a direct-drive motor, while the angle can be selected independently for both crucible and stage rotation. Both these features are designed to improve wafer uniformity within the furnace. Alpha 8S is also equipped with a number of safety features, including temperature, ammonia, and exhaust gas shut-off systems. The furnace is also designed to prevent over-temperature operation, with a temperature setting device that stops operation once the temperature exceeds the set point. The furnace also has an advanced auto-purge function, which purges the system between heat processes to optimize throughput for improved process uniformity. In addition to its top-of-the-line diffusion furnace, ALPHA-8 S also includes a host of supporting accessories to meet the needs of any semiconductor fabrication facility. It includes an electro-magnetic pump, temperature measurement probe, and wafer temperature equilibration stand. A number of additional components, such as a powdered-air filter, are also available as optional accessories. ALPHA-8S is a versatile and reliable diffusion furnace that can be used to produce high-quality, enhanced-performance semiconductor devices. Its simple yet advanced features and wide range of supporting accessories enable users to create a variety of wafer shapes, sizes, and thermal profiles. Whether the application requires high throughput, uniformity, or strict adherence to specific process parameters, TOKYO ELECTRON Alpha 8S is an ideal choice for wafer fabrication and assembly.