Used TEL / TOKYO ELECTRON Alpha 8S #293802479 for sale
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ID: 293802479
Wafer Size: 8"
Vintage: 1997
Vertical furnace, 8"
Process: ATM OXIDE
1997 vintage.
TEL / TOKYO ELECTRON Alpha 8S is a fully modular, 8-chamber diffusion furnace and accessories. It offers precise, high-quality processing capabilities in the area of homogeneous thermal processing. It caters for high-throughput applications and is designed to save time through superior operation and delivery. TEL ALPHA-8S is designed to allow effective thermal process optimization, with flexible operation features such as multiple substrate sizes, flexible control settings and a wide range of integrated components. TOKYO ELECTRON ALPHA 8 S diffusion equipment is equipped with advanced gas flow systems. The accurate and precise temperature control is achieved by utilizing the precise gas flow of high quality heat exchange gases. The high tolerance gas flow is accomplished by the precise gas flow control valve and the high-efficiency gas injector. The precise thermal gradient created by the injection is designed to reduce edge effects and improve uniformity. TEL ALPHA 8 S diffusion furnace is equipped with high-performance and low-impact ceramic substrates for shorter processing times and improved quality. The durable ceramic substrates withstand even the most aggressive process applications, allowing for increased time/yield performance. Additionally, the ceramics also feature a wide range of temperature tolerant materials, which ensures accurate and uniform processing results. TEL Alpha 8S diffusion equipment is equipped with an integrated power supply and a variety of safety devices to ensure safe operation. The integrated power supply features a pre-set maximum power setting to prevent overheating damage, while the wide range of safety features include automatic filter monitoring and cooling module monitors, temperature protection and overpressure protection, which help to ensure complete protection against damage. TEL ALPHA-8 S diffusion furnace is also equipped with advanced software, allowing for precise control and monitoring of the entire system. The software can be used to optimize process parameters, configure settings and monitor trends. Additionally, it includes a powerful data acquisition and analysis system, allowing for the monitoring and analysis of process parameters in real time. Finally, TOKYO ELECTRON ALPHA-8S diffusion equipment is equipped with techniques for transferring and transporting wafers, including robot transfer modules, CF bath ceramic modules, and wafer handling techniques. This makes for efficient process optimization and ensures that wafers can be safely and accurately handled. In conclusion, TOKYO ELECTRON Alpha 8S diffusion furnace and accessories provides a reliable, effective and cost efficient solution for high-throughput thermal processing. Its innovative design, accuracy, quality and safety features make it the ideal choice for intensive thermal processing applications.
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