Used TEL / TOKYO ELECTRON Alpha 8S #9054816 for sale
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TEL / TOKYO ELECTRON Alpha 8S is a diffusion furnace and accessories package used for the fabrication of semiconductor devices. It is a multi-purpose equipment that can be used for both bulk and device level processes. TEL ALPHA-8S is a vertical type diffusion furnace that is capable of maximum process temperatures up to 1,250°C. TOKYO ELECTRON ALPHA 8 S features a single chamber furnace that can be vertically expanded by the installation of dedicated Cassettes. The Cassettes can also be completely removed from the chamber if necessary. This flexibility allows different process parameters to be applied to the chamber without requiring modifications to the Cassette. The Cassette is also designed to house Wafer Cassettes during the processing stages. ALPHA 8 S uses Radiation Heater Control technology to ensure uniform temperatures within the chamber. This feature ensures production of excellent uniformity of both electrical structures and film structures during deposition and etching processes. These high temperature process results are also backed up by advanced analytical techniques such as Shear Force Analysis and Pyrometer Analysis techniques. TEL / TOKYO ELECTRON ALPHA 8 S also features a fully automated Gas Flow Control System. This unit is designed to regulate the temperature of furnace gases to provide superior gas flow control. The automated gas flow control capabilities also minimize contamination from ambient air relating to process failures. In addition to these features, TOKYO ELECTRON ALPHA-8 S comes with a large number of accessories to facilitate the efficient operation of the machine. This includes process gas supplies, an automatic carrier and cassette unload tool, carrier baking systems and a computer control asset. The computer control model allows real-time process monitoring, allowing the operator to make adjustments as necessary. Alpha 8S diffusion furnace and accessories package is a superior quality equipment that is designed to reliably and efficiently produce high quality semiconductor devices. Combining advanced heather, gas and computer control features, TEL Alpha 8S is the ideal choice for any wafer fabrication process.
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