Used TEL / TOKYO ELECTRON Alpha 8S #9060551 for sale

TEL / TOKYO ELECTRON Alpha 8S is a high-performance diffusion furnace and accessories designed to enable precision processing of semiconductor wafers, thin film devices, MEMS, optoelectronic, and other such electronic devices. With TEL ALPHA-8S, even the most advanced fabrication processes can be achieved with remarkable accuracy and high throughput. TOKYO ELECTRON ALPHA 8 S is equipped with a compact vacuum chamber, which has a volume of 95 liters, and a six-segmented quartz chamber liner for superior temperature uniformity. This design allows for quick and precise temperature control up to 1,400°C, with a temperature uniformity of ± 1.2°C. Additionally, its forced-air-cooled heater equipment is designed to maintain and optimize performance for long-term use. Alpha 8S is equipped with a high-precision gas distribution system, which is capable of providing a multitude of gases—including Argon, Helium, Nitrogen, and Oxygen—as well as reactive gases like Hydrogen and Deuterium. This gas delivery unit is crucial for most diffusion processes, as it ensures consistent and reliable delivery of all gases to the target areas. TEL / TOKYO ELECTRON ALPHA 8 S is also equipped with a variety of advanced features designed to ensure safety and reliability. These features include an ozone monitor to detect ozone concentrations at any point in the furnace, high-speed pressure control, as well as a high-speed overcurrent monitoring machine for preventing over-temperature damage, and an infrared heater temperature sensor for monitoring and controlling the temperature of the heating chamber. TEL ALPHA-8 S is designed for reliable operation in a cleanroom environment, with features such as a protective housing that prevents contamination of the process chamber, and an optical monitoring tool that detects open/closed doors and windows. Lastly, TOKYO ELECTRON ALPHA-8S is equipped with a data logging asset, which is capable of recording temperatures, pressures, process times, and other critical process parameters. This data can be accessed remotely, and saved in PC files for later analysis. In summary, TOKYO ELECTRON Alpha 8S is an advanced diffusion furnace and accessories designed for precision processing of a variety of semiconductor and electronic device types. With its compact vacuum chamber, temperature uniformity, high-precision gas delivery model, and advanced safety features, TEL / TOKYO ELECTRON ALPHA-8 S is well-suited for high-performance fabrication processes.