Used TEL / TOKYO ELECTRON Alpha 8S #9078699 for sale
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ID: 9078699
Furnace, 8"
Process: Poly
Safety specification: TEL Standard
System power rating:
AC200V, 3P / AC100V, 1P
Loading configuration:
(4) Loaders / (127) Wafer Slots
Process pressure (Torr): Low pressure
Process temperature: 600º C
FTP Heater: Installed
Rapid cooling unit: Installed
Heater type: VOS-40-017
Process gases:
Process gas MFC 1,2,3,4: N2
Process gas MFC 5, 6: SiH4
Process gas MFC 7, 8, 9: PH3
Gas system:
Filter: MOTT Pou-20S-SV2, Ni
Air valve: FUJIKIN Diaphragm type
Mega-mini and block
MFC: STEC SEC-74 series
Check valve: FUJIKIN O-ring seal type
Hand valve: FUJIKIN: Diaphragm type
Regulator: VERIFLO SQ series
Pressure transducer: NAGANO ZT 17
Others:
Joint: Gasket type: Pure nickel type
Piping material: SUS316L Up tube
Piping working method: Welding
Welding methods: Automatic welding
Gas exhaust system:
Dry pump: EBARA A150W-T
Main valve: MKS 172-1080P
Vacuum gauge: MKS Baratron sensor normal
Joint:
Gasket
JIS Method
Piping material: SUS316BA, Stainless steel
APC: MKS 253B-3-80-2, Butterfly valve
VG1: 0 to 10 Torr, Normal type
VG2: 0 to 1000 Torr, Normal type
VG3: ULVAC GP-2A, Pirani gauge
P.SW: Pueron, over pressure detect
Manifold:
Structure:
Sealing method: End point sealing
Material: SUS316L Stainless steel
Port:
Gas port: 3/8" Ultra torr
Inner T/C port: 20DAI Ultra torr
Exhaust port: 3: DIA
Cooling method: Water cooling
Safety interlock :
Gas flow low MFC: Too low gas flow
Alarm: > 5%
Abort: ± 10%
Gas flow high MFC: Too high gas flow
Alarm: > 5%,
Abort: ± 10%
Low PCW flow: No PCW supply
Alarm: > 3 min
Abort: > 5 min
Heater break down: > 7 min
PCW Leak detection: Alarm
Process heater over temperature: Chamber over heat
Heater break down: > 3 sec
Furnace area over temperature: Alarm
Heater break down: > 3 sec
SCR Area over temperature: Alarm
Heater break down: > 3 sec
Interruption of electric power: Alarm
Abort: < 3 sec
Heater break down: > 3 sec
Gas flow sequence: Alarm,abort
Pump off: Alarm, abort
Pump trouble: Alarm
Pressure low (reactor tube pressure): Alarm, abort
Pressure high (reactor tube pressure): Alarm, abort
.
Leak check (reactor tube pressure):
Main valve off delay: 10 min
Abort: > 20mTorr
1997 vintage.
TEL / TOKYO ELECTRON Alpha 8S is a cutting-edge diffusion furnace and accessory from the leading Japanese semiconductor equipment manufacturer, TEL. It is designed for use in the production of a wide range of semiconductor devices. TEL ALPHA-8S features advanced diffusion technology and accessories to enable fast and efficient fabrication of high-quality semiconductor components. TOKYO ELECTRON ALPHA 8 S diffusion furnace consists of an upper convection zone and a lower radiating zone, each of which is optimized to provide the best temperature profile and flow profile for fast, uniform heating of individual semiconductor components. The furnace has an exclusive Gas Nitriding Equipment (GNS) to help produce high-performance nitride layers. The integrated ambient temperature control system ensures that the equipment is kept at the optimum temperature. TEL / TOKYO ELECTRON ALPHA-8S features several advanced features for high performance and flexibility. It has "Multi-Zone" technology which provides up to 4 separate equal-temperature zones for simultaneous batch and single-wafer processing. It also has a patented Automatic Temperature Control Unit (ATCS) which automatically adjusts the heating process to optimize materials properties and minimize defects. Alpha 8S is equipped with the latest gas boxes and is capable of using various types of gas for each processing step. For the production of high-complexity components, TOKYO ELECTRON ALPHA-8 S provides an extensive suite of accessories. These include a sputter station, an electroless plating station, and a laser lift-off chamber. A high-precision, multi-contact metrology module is available for on-site evaluation of complex components. ALPHA 8 S can be used as part of a larger production machine or as a standalone diffusion furnace. Its user interface is highly intuitive, allowing for easy programming and maintenance. In addition, TEL ALPHA 8 S is designed for low maintenance and long-term reliability. This makes it an ideal choice for high-volume production of semiconductor components.
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