Used TEL / TOKYO ELECTRON Alpha 8S #9216298 for sale
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ID: 9216298
Wafer Size: 8"
Vintage: 2004
Vertical furnace, 8"
Process: LPCVD Nitride
Main system:
Main body
Utility box
Includes:
System layout type: U / Box Type (L)
System hand: LL
N2 Load lock
Heater type: WMM-40-101 Mid temperature
Torch heater
SMIF: TEL Integrated SMIF
Process gases:
N2 (20SLM)
N2 (5SLM)
N2 (1SLM)
NH3 (2SLM)
DCS (200SCCM)
O2 (2SLM)
Gas distribution system:
Basic style: Conventional gas system
Tubing material: Stainless steel
Tubing finish: Electro-polished
Manual valve: FUJIKIN
Air-operated valve: FUJIKIN
MFC: AERA
Wafer / Cassette handling:
Wafer type: 8" SEMI STD-Notch
Cassette type: Entergris / XT200-01E
Cassette number of wafers: 25
(16) Cassettes storage
Fork type / Material: 1+4
Fork variable pitch: Variable
Boat / Pedestal:
(150) Production wafers
Boat rotation installed
System controls:
System controller: TS-4000Z
Signal tower colors: G/R/A
General pressure display units: Pressure Mpa
Cabinet exhaust display units: Kpa
Furnace temperature controller: M121
Host communications:
Host communications: User host computer
User host computer I/F: SECS I/II (RS232)
Information transfer protocol: GEM
Equipment host I/F connection: U/BOX Top
Group controller: HIA
Power:
Voltage 3 Phase: 208 VAC
Voltage 1 Phase: 120 VAC
UPS Input voltage / Output voltage: 230 V / 230 V
2004 vintage.
TEL / TOKYO ELECTRON Alpha 8S is an industrial-grade diffusion furnace and accessories package, perfect for semiconductor and other device manufacture. TEL ALPHA-8S is based on a quartz cassette linear transfer system (QCLT) platform, a ground-breaking technology offering unmatched control, accuracy and reproducibility in semiconductor fabrication. TOKYO ELECTRON ALPHA 8 S features an advanced, 8-stage process chamber to provide high performance annealing, drive-in and other diffusion processes. With programmable temperature control on each stage, TOKYO ELECTRON Alpha 8S can rapidly heat and cool materials to form perfectly consistent microstructures with tight process parameters and uniform device characteristics. TOKYO ELECTRON ALPHA-8S also features adjustable thermal-sources and small-footprint capabilities for complete flexibility in potential process configurations. The package includes integrated reflector systems for maximum uniformity of radiation, allowing for high-precision control of temperature processes. TEL / TOKYO ELECTRON ALPHA-8 S also includes several shielding and vacuum systems to ensure a safe and uninterrupted diffusion process. The package includes a septum valve and a gas selection cabinet, which allow you to quickly and smoothly switch between different gases during the process. TEL Alpha 8S also features an automatic leak-check system to monitor the integrity of the chamber and quickly identify any gas leaks. In terms of safety, TEL ALPHA 8 S features a variety of sensors and monitors for detecting potential process hazards. The package includes both infrared and conventional pyrometers for precise temperature measurements to further ensure accurate, safe and reproducible diffusion processes with TEL / TOKYO ELECTRON ALPHA 8 S. Apart from its excellent, automated diffusion capabilities, TEL / TOKYO ELECTRON ALPHA-8S also comes with a full suite of accessories to help you get the most out of the package. The package includes pneumatic loading systems, thermocouple circuitry, sensing and control systems, and several optional extra sensors, monitors, and more. All in all, ALPHA-8 S diffusion furnace and accessories package are the perfect solution for precise and consistent diffusion processes. Reliable, safe, and with a complete selection of controls and accessories, this package will ensure your next diffusion process is a success.
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