Used TEL / TOKYO ELECTRON Alpha 8S #9227415 for sale

TEL / TOKYO ELECTRON Alpha 8S is a diffusion furnace & accessories tailor-made for silicon-on-insulator (SOI) and silicon-on-sapphire (SOS) technologies. It is designed with the latest innovations in process engineering, control systems, and the highest safety standards, enabling excellent process flexibility for wafer processing in the semiconductor fabrication industry. TEL ALPHA-8S features a plasma etching equipment, an oxidizing system, an exhaust unit, a temperature instrumentation display, and a load port. The electrostatic chuck (ESC) aids in maintaining wafer temperature and in controlling the temperature-sensitive oxide etching process critical for SOI and SOS technologies. The hardware of the ESC is located on the rear side, with the vacuum beads located at the back. It has a high-temperature furnace that can process up to 1050°C and is contained in an advanced exhaust machine with a heating chamber counter-pressure tool for high-level safety. TOKYO ELECTRON ALPHA 8 S also features a controller with a graphical user interface (GUI) and a remote monitoring asset that allows users to monitor their process from remote locations. This remote monitoring model utilizes a web server and browser interface, which allows operators to adjust recipes with ease. It also logs temperature and pressure measurements, chemical concentrations, and exhaust flow rates for inspection and analysis. An optional atomization equipment can be integrated into TEL Alpha 8S to create fine groups of floating particles and provide uniform distribution of particles across the wafer. This system can also be used to modify the deposition rate and pattern of film materials such as silicon and silicon dioxide. In addition to its robust feature set, ALPHA 8 S adheres to the highest industry safety standards and ensures a clean and safe work environment, reducing the risks of hazardous chemicals and materials are used in a controlled and monitored manner. With its advanced process engineering and monitoring capabilities, TOKYO ELECTRON ALPHA-8S is the perfect tool for SOI and SOS processing in the modern semiconductor industry.