Used TEL / TOKYO ELECTRON Alpha 8S #9257734 for sale

TEL / TOKYO ELECTRON Alpha 8S is a computer-controlled diffusion furnace and accessorie that is used for creating integrated circuits from single crystal silicon wafers. TEL ALPHA-8S is designed to ensure high throughput processing and uniformity across the processing plane, allowing fabrication of complex structures with a minimum of manual intervention. TOKYO ELECTRON ALPHA 8 S is equipped with a vertical 3-part loading tube, which consists of a quartz sleeve, ceramic sleeve and metal housing. The vertical loading configuration has been designed to align the entire loaded wafer with the high temperature zone in the center of the furnace. This ensures uniform high temperature throughout the loading area and controls the vertical convection of hot air which helps prevent oxidation and oxidation damage to the wafer. TEL / TOKYO ELECTRON ALPHA-8S has three heating zones (HZ): the pre-heat zone (PHZ), the load zone (LZ) and the process zone (PZ). The PHZ ranges from 100°C - 200°C and is used to heat the wafers to the desired temperature before entering the LZ. The LZ is divided into two regions, the top region (TR) and the bottom region (BR). Both of these regions are equipped with an independent gas and temperature control system which allows precise control of the gas flow and temperature. The LZ is heated to temperatures ranging from 800°C - 1300°C with a temperature uniformity of +/-5°C across the whole loading plane. The PZ can reach temperatures ranging from 1500°C - 1800°C, while maintaining a uniformity of +/-5°C over the entire process plane. TOKYO ELECTRON ALPHA-8 S also provides a comprehensive set of accessories such as gas control consoles, wafer lifters, quartz and ceramic tube assemblies, special crucibles, and door interlocks that enhance functionality. TOKYO ELECTRON Alpha 8S can be customised to meet the particular needs of the user. Options are provided in the instructions manually, via a PC, or through a panel display. Alpha 8S offers superior process control in the form of TEL Advantage software for windows 95/98/NT. This powerful software is designed to simplify the process control by simplifying the operation of the furnace, aiding in setting up the process, and providing data logging capability. The software also provides for data analysis and collection of pre-defined data sets for statistical analysis. TEL ALPHA 8 S is an outstanding combination of performance, technology and convenience that allows for high throughput and uniform integrated circuits to be fabricated. It is a reliable, easy to use system that is suitable for single wafer processing up to a maximum size of 30cm.