Used TEL / TOKYO ELECTRON Alpha 8S #9282768 for sale

ID: 9282768
Furnace Process: LP Sin 1997 vintage.
TEL / TOKYO ELECTRON Alpha 8S is an advanced diffusion furnace with accompanying accessories. It has been designed to suit a wide variety of applications, such as silicon wafer cleaning, oxidation, boron implantation, nitride deposition, and more localised operations such as rapid thermal processing (RTP), rapid thermal annealing (RTA) and laser annealing. TEL ALPHA-8S features high-quality components and advanced technologies for alloy, reaction, annealing, and deposition processes. It has rapid heating rate of up to 650°C/s and a maximum temperature of 1350°C to enable high temperature alloy and reaction processes. Advanced technologies including RTP 3D, multi-stage process control, in-fabrication thermal cycle measurements and more provide accuracy, repeatability and precise process temperature control. With its advanced features, TOKYO ELECTRON ALPHA 8 S offers high reliability and reduced cycle time. The diffusion furnace incorporates a porous ceramic heating mechanism to realise uniformity in temperature within ±2°C; by reducing non-uniform temperature distribution, the diffusion furnace can serve multiple simultaneous processes with equal reliability. All of the accessories utilise the same dependable heating mechanism, and the integrated view of process window allows for a clear assessment of process completion in real-time. TEL / TOKYO ELECTRON ALPHA-8 S is equipped with ion source for deposition, and its optional RTP 3D enables ultra-precise localised thermal treatment. The multi-zone control unit on the diffusion furnace enables simultaneous cycle execution, which further reduces cycle time by 8%. The built-in diagnostics feature of the diffusion furnace ensures that any operation-related faults are easily identified and quickly rectified, boosting the uptime of diffusions furnaces. ALPHA-8S is the perfect choice for professionals looking for a reliable, efficient and precise diffusion furnace. Its advanced features, such as rapid heating rate, uniform temperature distribution, RTP 3D, multi-zone control and built-in diagnostics, ensure high productivity. By investing in ALPHA 8 S today, you will benefit from both improved performance and increased profitability.
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