Used TEL / TOKYO ELECTRON Alpha 8SC #9062879 for sale

TEL / TOKYO ELECTRON Alpha 8SC is a double-shell diffusion furnace and accessorie, an equipment used in the semiconductor manufacturing industry. It is designed to provide an optimal environment for the deposition of different materials onto wafers. This diffusion furnace offers a wide range of functionality to its users, from high-temperature oxidation to low-temperature boron implantation. TEL ALPHA 8 SC features a large quartz susceptor chamber that provides excellent uniformity and thermal conductivity for more efficient processing. Its high-power linear electron-cyclotron frequency heating systems can reach temperatures of up to 1500°C. This unit is equipped with two low-emission pyrometers, providing real-time monitoring of temperatures at the susceptor level during operation. TOKYO ELECTRON ALPHA 8S-C also offers an Automated Batch System with up to 64 processes that ensure total process control and data collection. Electrostatic chucks are also available with this machine to securely hold wafers in place during processings, with an adjustable mirror to direct the incoming plasma. The 8SC incorporates high-speed, high-power Gas Exchange technology, which provides grid-like anneal profiles and process stability with faster production speeds. To facilitate efficient performance, advanced fan separation systems keep depleted gases and particles away from the working area. Overpressure systems also protect wafers from surface contamination during operation. TEL Alpha 8SC is designed to offer a highly automated, high-performance operation. It uses SafetyPlus software, which enables a faster, smoother startup as well as easier and faster debug and upgrade processes for more reliable operation. The 8SC also comes with HyperDrive, an optional remote control application for users who wish to monitor and control processes remotely. In summary, Alpha 8SC is a sophisticated diffusion furnace and accessory solution, designed to provide excellent suitability for wafer processing with high efficiency and accuracy. It is the cutting-edge solution for modern semiconductor manufacturing and is sure to be a valuable addition to many fabrication facilities.