Used TEL / TOKYO ELECTRON Alpha 8SC #9206232 for sale

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ID: 9206232
Furnace 1996 vintage.
TEL / TOKYO ELECTRON Alpha 8SC is a diffusion furnace and accessories set specifically designed for semiconductor production. The 7-chamber equipment is equipped with two cassette loaders and can process up to 5,000 wafers per hour. It also features an advanced back-to-back heating system for faster and more consistent heating. TEL ALPHA 8 SC utilizes a patented annealing unit known as TEL High Speed Annealing (HSA) to achieve the highest quality thermal budgets and a minimum of heat loss. HSA utilizes an inner lid machine to introduce and remove gas quickly and accurately. It also uses a "Floating Pressure and Temperature Tool" to prevent excessive heating or cooling. TOKYO ELECTRON ALPHA 8S-C is designed with ease of use in mind. The user-friendly touchscreen interface makes it easy to control the chamber's functions. Additionally, the intuitive software ensures ease of operation of all the chamber's functions. ALPHA 8 SC includes TOKYO ELECTRON Pyro-Direct Thermal Processing (PDTP) hardware which provides powerful, accurate temperature measurement and control to ensure the highest thermal budgets. Additionally, the innovative vapor deposition asset is engineered to provide uniform films throughout the entire process for maximum product quality. TOKYO ELECTRON Alpha 8SC comes with an integrated process analyzer which provides real-time measurement of the substrates for improved process rate and yield. Furthermore, by using the external TEL / TOKYO ELECTRON Global Real-time Analyzer (GRTA), user can measure and adjust temperatures and other process parameters to optimize performance. TEL / TOKYO ELECTRON ALPHA 8 SC also includes TEL Smart Model, which features a suite of advanced fault detection and correction functions to monitor wafer temperature, pressure, and process gas levels during the process. It also supports advanced control techniques such as predictive modeling and online tuning to optimize process performance. TEL ALPHA 8S-C is designed for process versatility. Its wide range of compatibility allows it to handle a wide variety of substrates and process flows. It's also designed with a simple cooling equipment to make the transition from one process to another smoother and faster. Overall, Alpha 8SC is a highly advanced, reliable, and energy efficient diffusion furnace and accessories set that provides superior performance, easy operation, and process versatility for semiconductor production.
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