Used TEL / TOKYO ELECTRON Alpha 8SC #9383796 for sale
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ID: 9383796
Wafer Size: 8"
Vintage: 1997
Furnace, 8"
Process: ISC-Si3N4
Heater type: VOS-40-017 (400°C - 850°C)
(100) Sheets
Forced air cooling unit
Quartz jig:
(2) 1105-300526-12 Fin hoon tows
1105-301109-12 Honto cover
1105-301109-12 Insulation cylinder cover (CAP-SIN)
(2) 1105-301121-12 GUYCANs
(2) 1105-301122-12 NIKONs
(2) 1105-301123-13 Manifold covers
1105-100420-14 SEKI ABOTO
Pump
Seismic isolation table
1997 vintage.
TEL / TOKYO ELECTRON Alpha 8SC is a diffusion furnace and accessory designed for use in large-scale semiconductor fabrication processes. The equipment allows for precise control of wafer temperature, power supply levels, and its own operation parameters. As an advanced tool for the manufacture of high-performance integrated circuits, it can carry out a wide array of processes, including multi-layer diffusion, anneal and oxidation, as well as selective emitter, CMP, low-temperature anneal, and Cu redistribution layers. TEL ALPHA 8 SC features a user-friendly touchscreen interface with a customizable operating environment. The system also includes several safety features, such as a double-wall outer chamber that automatically shuts off the turbine and furnace in the event of a hydrogen leak. The furnace is also equipped with a self-diagnostic unit that enables preventive maintenance operations and helps to prevent time-consuming and expensive repairs. TOKYO ELECTRON ALPHA 8S-C features a unique dual-zone heating machine that allows for efficient processing of delicate wafers and optimal utilization of their area. The zone control is managed by a powerful programming algorithm called split-zone operation. This technology ensures that the wafer temperature remains at the optimal level for the specific process, while minimizing power consumption. ALPHA 8S-C offers an extensive range of accessories, including showerheads, raising/lowering mechanisms, zone control systems, transition holders, load locks, roller cup lifters, robots, end effectors, sensors, pumps, and many other components. Additionally, the tool is compatible with a wide range of substrates, including silicon, gallium arsenide, copper, titanium, quartz, and others. The performance of TOKYO ELECTRON ALPHA 8 SC is ensured by advanced engines, such as Total Exhaust Management, Exhaust Profile Control, and Shared Zone Control. These features provide unmatched trim control and temperature stability for wafer production processes. TEL Alpha 8SC provides reliable operation, outstanding performance, and precise control, making it an ideal choice for high-volume semiconductor processing. Its advanced features, accessories, and user-friendly interface make it an indispensable tool for semiconductor fabrication.
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