Used TEL / TOKYO ELECTRON Alpha 8SD #293776299 for sale
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ID: 293776299
Wafer Size: 8"
Vintage: 1997
Furnace, 8"
Process: O2 Anneal, dry oxide
Wafer shape: SNNF
Wafer cassette: Plastic, 8"
(150) Product wafers
Gas capabilities: N2, O2
TS4000Z System controller
(5) Zone heaters
Paddle control thermocouple
Reserved batch operation
Place of control T/C: Between outer tube and inner tube
(5) End effectors
Maximum temperature: 1100°C
No SMIF Interface
No N2 Load lock
No boat rotation
1997 vintage.
TEL (TOKYO ELECTRON) TEL / TOKYO ELECTRON Alpha 8SD diffusion furnace is an incredibly reliable and performance-driven diffusion furnace for series production in the semiconductor industry. It provides customers with a powerful and efficient solution for thermal processing. This diffusion furnace will provide users with higher throughput and throughput consistency compared to its predecessors. It is also specifically designed to handle multiple wafer sizes from 200mm to 6-inch without the need for manual adjustments or downtime. TEL Alpha 8SD diffusion furnace uses advanced thermal processing technology for both diffusion and oxidation up to 1000°C. It has an ultra-compact design which allows it to take up minimal quantities of space. This makes it ideal for high-density production lines. The multiple wafer size handling options, allows users to easily scale up throughput as necessary. TOKYO ELECTRON ALPHA 8S-D diffusion furnace has a powerful independent distribution system which includes a single flow dynamic source. This allows it to easily handle high-temperatures and high-power application while maintaining consistent process parameters. The high-performance rearward-facing system also ensures uniformity and achieves precise thermal control throughout the process. This enables faster processing times and better results. The furnace also comes with a comprehensive range of advanced heating elements and cooling options. The direct-heated wafer support and ultra-low thermal cycling allow for rapid thermal ramp rates. The advanced cooling options help prevent wafer to wafer contamination. Additionally, the advanced control features ensure repeatability and high precision in the process. TEL / TOKYO ELECTRON ALPHA 8S-D diffusion furnace also comes with a 50-step programmable memory which stores process recipes for up to 50 different application operations. It comes with a Windows-based PC professional suite software for process development and control. The user-friendly environment allows for easy recipe entry and repeatable processes. Users can also generate process reports for documentation and traceability. In conclusion, Alpha 8SD diffusion furnace from TEL / TOKYO ELECTRON (TEL) is an incredibly reliable and performance-driven diffusion furnace for series production in the semiconductor industry. It provides customers with a powerful and efficient solution for thermal processing. This diffusion furnace will provide users with higher throughput and throughput consistency. With additional features such as a comprehensive range of advanced heating elements and cooling options, programmable memory and a Windows-based PC professional suite software, this diffusion furnace is an excellent choice for high-density production lines.
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