Used TEL / TOKYO ELECTRON Alpha 8SE-Z #293817396 for sale
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ID: 293817396
Wafer Size: 8"
Vintage: 2004
Furnace, 8"
Process: D-POLY
L-Type system layout
SUS furnace front surface finish
VMM 40-101 heater
N2 load lock
LC750 O2 analyzer
WAVES main controller
Fujikin integrated gas system
Fujikin manual and air-operated valves
UNIT / UFC 1661 Mass Flow Controllers (MFC)
MKS Pressure Transducer (PT) sensors
MKS Digital Pressure Monitor (DPM)
Gas flow chart and operation panels
RIKEN KEIKI gas detector
Auto wafer aligner
Fork wafer presence sensor
Magnetic seal rotation
No process kit or vacuum pump
2004 vintage.
TEL / TOKYO ELECTRON Alpha 8SE-Z is a diffusion furnace that is specifically designed to provide superior processing performance. It is capable of producing the finest thermal oxidation for silicon photovoltaic cells, substrates, and other semiconductor fabrication processes. This high-quality, cost-effective diffusion furnace comes with several essential features which make it suitable for many different research and industrial applications. TEL ALPHA 8SEZ offers superior thermal properties, with its maximum operating temperature reaching up to 1150°C and its maximum heating rate of 4°C/sec, enabling for fast, high quality heat treatments. The furnace can operate in two different modes, Batch and Continuous, allowing for flexibility during different applications. The batch mode allows for more uniform temperatures with minimal thermal gradients throughout the chamber, while the continuous mode enables precise temperature control and rapid heating and cooling when needed. The advanced design includes a six-layer molybdenum silicide heater capable of providing high source and uniform temperature distribution, and high thermal uniformity over the entire chamber. The furnace also comes with a quartz tube heater and a thermally isolated, double wall, 304 stainless steel chamber for superior corrosion resistance and high performance. This unique design allows for low levels of contamination while also ensuring excellent heat transfer performance. Its operation is easy to manage thanks to its real-time automation system, which monitors process conditions from start to finish. For precise control, TOKYO ELECTRON ALPHA-8SE-Z features a digital PID control loop that continuously monitors temperature and maintains control within a ±1° precision range. Additionally, a protective coating prevents oxidation during the process, allowing for superior quality results. TOKYO ELECTRON ALPHA 8SEZ also comes with a variety of accessories, such as an observation window monitor, large individual pressure control, a rotating sample shuttle, and various specimen holders. All of these accessories make the furnace even more user-friendly and efficient for special research and industrial applications. This diffusion furnace stands out thanks to its advanced design, flexibility, precise temperature control and multiple additional accessories. TOKYO ELECTRON Alpha 8SE-Z is an ideal solution for silicon photovoltaic cells, substrates, and other semiconductor fabrication processes.
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