Used TEL / TOKYO ELECTRON Alpha 8SE-Z #293820845 for sale
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ID: 293820845
Vintage: 2004
Furnace
Process: high‑temperature oxidation
2004 vintage.
TEL / TOKYO ELECTRON Alpha 8SE-Z is a diffusion furnace and its associated accessories. This diffusion furnace is designed specifically for use in advanced semiconductor processing, enabling researchers to make powerful and efficient chips with greater precision. TEL ALPHA 8SEZ is unique in its ability to provide a wide range of critical process functions needed in modern device fabrication, such as precise temperature control, high power delivery and high-throughput substrate processing. TOKYO ELECTRON ALPHA-8SE-Z is capable of controlling temperature with a resolution of 0.1°C, as well as providing a maximum temperature of up to 1000°C. It is equipped with an open-face, closed-loop pyrometer with an optical wavelength range of 4 to 38 microns and an optical angular resolution of 0.02°, allowing for high precision in measuring the temperature of the substrate sample during diffusion processes. TEL ALPHA-8SE-Z also holds tight temperature tolerances in order to maintain quantitative thermal integrity. Alpha 8SE-Z is outfitted with an array of accessorized tools to assist in semiconductor processing. These include a 4-zone EDGE processor, Wafer-Y-Table, Mask-Y-Table, Process-Y-Table, and After-Processer. The 4-zone EDGE processor is designed to provide advanced wafer edge profiling, allowing for higher device yields in etching, diffusion, CMP and other processing. The Wafer-Y-Table allows for movement of wafers on a vertical axis, facilitating ease of use and enabling more efficient user operation. The Mask-Y-Table, Process-Y-Table and After-Processer enable ease of use when processing wafers, and allow users to perform complex processes with accuracy and precision. ALPHA 8SEZ also features advanced automation functions including PID loop controllers and programmable logic controllers (PLC) to facilitate automation and reduce user task times. It also comes equipped with a proprietary batch control system (BCS), which is an advanced memory chip system designed to store and manage process recipes, making it possible for users to store multiple recipes for quick and easy access. TEL Alpha 8SE-Z also has top of the line safety features such as a built-in nitrogen atmosphere, temperature cut-off, cooling protection and various modular alarms, making it ideal for use in both research labs and production-scale installations. To ensure quality materials and parts, all components for TEL / TOKYO ELECTRON ALPHA 8 SE Z are sourced from reputable suppliers to ensure compatibility, reliability and long-term performance. In conclusion, TEL / TOKYO ELECTRON ALPHA-8SE-Z is a state of the art diffusion furnace and accessory package. Its combination of temperature control, precision features, automation functions, and advanced safety features makes it an ideal choice for advanced semiconductor processing and production-scale installations.
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