Used TEL / TOKYO ELECTRON Alpha 8SE-Z #293820846 for sale

TEL / TOKYO ELECTRON Alpha 8SE-Z
ID: 293820846
Vintage: 2002
Furnace High‑Temperature Oxide (HTO) Process 2002 vintage.
TEL / TOKYO ELECTRON Alpha 8SE-Z is a diffusion furnace and accessories that provide advanced nitride deposition capabilities and precise wafer process control. With its high-efficiency design and powerful process capabilities, TEL ALPHA 8SEZ is ideal for the ultra-thin advanced semiconductor devices made with III-V compound materials. TOKYO ELECTRON ALPHA-8SE-Z is equipped with a unique and powerful horizontal-type multichamber design. This enables high temperatures up to 1200°C along with high process accuracy and repeatability due to the three-zone heated Crucible and Hot Zone design, promising greater efficiency in silicon and compound semiconductor device manufacturing. The high-efficiency process is further enhanced with a dynamic temperature control feature, providing more uniform profiles in temperature and deposition rate. TEL Alpha 8SE-Z also features dual preheating and loading options, ensuring efficient operation and reliability of the furnace equipment. By utilizing the rapid preheating modes of the furnace, the user can reduce process times while also ensuring minimum thermal stresses on the wafer cassette. The system is also fitted with a range of quality monitoring functions, such as particle measurement and gas analysis, as well as a total nitrogen composition detector and endpoint monitoring systems. This ensures that users can monitor process parameters and obtain quick feedback for better control of the nitride applications. TOKYO ELECTRON ALPHA 8 SE Z also offers an optional user-friendly Graphical User Interface, allowing users to conveniently manage their process parameters, view data logs and also easily monitor the unit status. The controller also enables furnace systems network connection, meaning users can access and manage their devices remotely and easily monitor and troubleshoot their processes. Overall, ALPHA-8SE-Z is an efficient and powerful diffusion furnace that provides precise wafer process control and optimal nitride deposition. By being equipped with a range of advanced features, quality monitoring systems and convenient network connection, this machine helps deliver reliable and high-purity nitride deposition with greater accuracy and repeatability.
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