Used TEL / TOKYO ELECTRON Alpha 8SE-Z #9186048 for sale

TEL / TOKYO ELECTRON Alpha 8SE-Z is a diffusion furnace and accessories equipment designed specifically for semiconductor wafer processing and fabrication. It is a benchtop, stand-alone system that is able to process 8-inch (200mm) wafers from start to finish. The unit is designed to provide superior mass transport, uniform process temperatures, and fast wafer turnaround times. TEL ALPHA 8SEZ is equipped with an all-aluminum, low-thermal mass, low-thermal conductivity furnace chamber. This chamber provides maximum repeatability and tight temperature control. A dual-zone gas control machine with a high precision digital flow-controller is integrated to deliver high purity gas for furnace operations. The tool also features a quartz cold-wall with an adjustable nozzle for pre-heat and vac-heating. The nozzle is adjustable to accommodate different wafer sizes and attain precise temperature control. TOKYO ELECTRON ALPHA-8SE-Z is specifically designed to process 8" (200mm) wafers with maximum repeatability and control. The asset is capable of sintering, annealing, rapid thermal processing, oxide formation, and other processes. A top-loading and unloading model is automated to provide fast wafer handling with minimal operator intervention. The process chamber is isolated from the controller and the process stacks are equipped with double seals to prevent intrusion of ambient contaminants. TEL Alpha 8SE-Z supports the integration of several accessories and third party components connecting the main equipment. It is compatible with TEL in situ process monitoring by spectroscopy (PMX). It is also compatible with TIM (Thermal Imaging Module) for visualization of the sample temperature and process zone. The system can be configured to automate the deposition process using . It is also compatible with CVD and PVD systems to enable additional process steps such as dopant addition, oxidation of dopants, and oxidation of surfaces. To ensure optimal operation, TOKYO ELECTRON Alpha 8SE-Z is equipped with an extensive set of process parameters that can be programmed with a touch screen interface. The process parameters are fully editable and the unit is compatible with several statistical process control systems. The machine runs on software that incorporates a user-friendly, modern interface with great graphics and intuitive features. Tool backup and logging are also incorporated for data security and traceability. TEL ALPHA 8 SE Z is a reliable, efficient, and modern diffusion furnace with advanced features and accessories for semiconductor wafer processing and fabrication. It is designed to provide high repeatability, uniform process temperatures, and fast wafer turnaround at a competitive price.