Used TEL / TOKYO ELECTRON Alpha 8SE-ZVANS #293590991 for sale

TEL / TOKYO ELECTRON Alpha 8SE-ZVANS is a highly advanced and reliable diffusion furnace equipment with a variety of accessories to improve performance and reliability. The system is built with an advanced wafer transfer robot for superior uniformity and distortion control, making it one of the best solutions for advanced wafer processes. TEL Alpha 8SE-ZVANS uses a horizontally configured α-irradiation diffusion furnace for superior uniformity and accuracy. It boasts a uniform temperature profile across each wafer, with a central temperature of 1,200 degrees Celsius and a temperature uniformity of ±2°C over a 200mm range. Additionally, the temperature uniformity of TOKYO ELECTRON Alpha 8SE-ZVANS can be automatically adjusted by its advanced control unit. The machine also has a Built-In Oxide Gas Generator (BOGG) which allows for improved repeatability and accuracy of oxide deposition processes. The low-pressure plasma source of the BOGG enables precise control of oxidation parameters, making it an invaluable asset for improving the quality of sol-gel and CVD oxides. Alpha 8SE-ZVANS also features a hot plate and rapid heating/cooling plate that allows for higher uniformity when processing silicon substrate. In addition to its industry-leading diffusion furnace, TEL / TOKYO ELECTRON Alpha 8SE-ZVANS ships with a variety of tailor-made accessories for improved operation of the tool. It comes with several wafer handling devices that provide superior asset control such as the AC-roller arm for precise wafer positioning, the Wafer loader for automatic insertions, and the ECF-Front robot for handling up to eight wafers at one time. Lastly, the model is also equipped with state-of-the-art software solutions for improved hardware equipment monitoring. These solutions include the AioSoft DB Suite and the Aptio Analyze System which provide real-time analysis and insightful wafer information such as temperature control, uniformity, and overall performance parameters. Overall, TEL Alpha 8SE-ZVANS is very efficient, reliable, and accurate diffusion furnace unit with all the necessary features and features integrated accessories to ensure superior performance. With its superior temperature uniformity, advanced gas generator, hot plate, and other unique accessories, TOKYO ELECTRON Alpha 8SE-ZVANS is the ideal solution for advanced wafer processes.