Used TEL / TOKYO ELECTRON Alpha 8SE #122705 for sale
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ID: 122705
Wafer Size: 8"
Vintage: 2007
Thermal process furnace, 8"
Flat type wafer
Signal tower: (4) color
I/O type
Rapid cooling unit
Capacity: (125) wafers per batch
Controller
Waves V3.23 R001 (D01FFF-000F)
(2) HDD: 4.3 GB
TEB 408 HDMC Rev 2.0B
SVA 041
TEB 107 ECS5
DVE P750/51-TR
TEB 103 FPIF
Temperature controller: 560A
Pressure controller: CKD
WVG controller: WVG-SC-010Y1B2B
Vacuum pump: Ebara A150W-T
2007 vintage.
TEL / TOKYO ELECTRON Alpha 8SE is a diffusion furnace and accessory designed to facilitate advanced thermal processes with consolidated process chamber and transportation capabilities. Its design supports a range of applications including Power-MOS, dedicated power devices, and BiCMOS as well as high-temperature packaging. TEL ALPHA-8SE stands out among diffusion furnaces for its vacuum wafer transfer equipment, which allows wafers to be transferred from a laminar flow isolation chamber into the process chamber of a diffusion furnace. This ensures maximum cleanliness and environmental control during the diffusion process. The transfer system also makes it easier to manipulate wafers without having to open the door or expose them to possible contamination. TOKYO ELECTRON ALPHA-8 SE also features a hi-performance and multi-function digital process controller. This controller allows for precise control of the temperature and pressure in the diffusion chamber and for programming of complex processes. The controller can sweep temperature and pressure at different rates, allowing for a variety of process parameters to be set, from the basic to the most complicated. TOKYO ELECTRON Alpha 8SE has a unique low-pressure reaction gas delivery function which makes sure that the gaseous reactants are delivered safely and accurately. This also makes sure that the diffusion process is maintained in a very narrow and uniform profile and that the reactants do not partially diffuse on the surface of the sample at high pressure. This makes TEL / TOKYO ELECTRON ALPHA 8S-E an ideal instrument for advanced thermal processes. ALPHA-8 SE also relishes in an integrated control unit. This machine allows the user to program complex processes and preset temperature and pressure profiles. Additionally, this integrated control tool is responsible for the sample monitoring, gas-monitoring, safety monitoring, and the preventative maintenance and upkeep of the furnace asset. This ensures maximum efficiency and reliability of TOKYO ELECTRON ALPHA 8S-E diffusion furnace. Due to its design and construction, Alpha 8SE diffusion furnace has the ability to perform thermal processes with minimal contamination, and at a high level of repeatability and reliability. This makes it an ideal choice for advanced thermal processes and research. Furthermore, TEL ALPHA 8 SE uniquely combines the features of high-precision temperature control, high-pressure reaction gas delivery, and flexible integration with various kinds of process tools.
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