Used TEL / TOKYO ELECTRON Alpha 8SE #144248 for sale
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ID: 144248
LPCVD LP-BSG TEOS furnace, 8"
Flat / notch type: Notch
Signal tower: 3 color (RYG)
SMIF or I/O type: I/O type
AGV compatibility: Not use
Rapid cooling unit: Not use
Load lock system: Not use
Production wafer quantity: 150
Controller and software:
HD version: WAVES V3.11 R0008
HDD capacity: 4.3 GB
TEB 408-11 HDMC
SVA 031
TEB 107 ECS5
M/C TEB 205
TEB 103 FPIF
Configuration: Alpha-8SE
Power: (phase, voltage, frequency)
Heater power: 3 phase, 50/60 Hz 440V
Controller power: 1 phase, 50/60 Hz 100V
Pump power: 3 phase, 50/60 Hz 440V
MFC flow:
MFC1: STEC N2, 20 SLM
MFC2: STEC N2, 200 SCCM
MFC3: STEC TEOS, 300 SCCM
MFC4: STEC N2, 5 SLM
MFC5: SAM CLF3, 5 SLM
MFC6: STEC TMB, 300 SCCM
Heater model: VMM 40-101
Vacuum control: EBARA 150x40UERP6M-D
Controller specifications:
Main controller: WAVES
Temperature controller: Model 560A
Pressure controller: PCU1000 (PCV control)
Mecha controller: T-Bawl
Burn controller: None
MFC controller: None
Powered off
2004 vintage.
TEL / TOKYO ELECTRON Alpha 8SE is an advanced diffusion furnace and accessory equipment designed to provide high-quality fabrication of semiconductors. This system is composed of a quartz chamber, a wafer boat, a bell jar, and a heat-resistant auto-lift assembly that places the wafer boat in the chamber. Its quartz chamber is designed to provide close-coupled heat and energy uniformity, while the bell jar allows for ultra-clean working conditions. The auto-lift assembly ensures easy access to the wafer boat inside the quartz chamber and precise positioning with minimum stress. TEL ALPHA-8SE furnace also features an advanced high-endurity, thick-film heater. This heater can provide up to 500 watts of power and up to 150 watts/cm2 of annealing energy. It also offers a wide temperature range from 25°C to 1200°C. The precise control of the heat is made possible by its built-in temperature control unit, and its Graphite susceptor ensures precise uniformity. TOKYO ELECTRON ALPHA-8 SE also comes with excellent environmental control capabilities. It is process compatible with a range of ambient air, dry air, and other gases, and has a filter-free design for improved environmental requirements. In addition, it has a high purity wall and roof, low-pressure options, and other advanced BPSG and chemical vapor deposition capabilities. TEL / TOKYO ELECTRON ALPHA 8 SE also comes with a wide range of operational features. This includes an integrated electrical drive machine with intuitive joystick control, an on-board master programmable logic control, and a touchscreen data entry tool. In addition, TEL / TOKYO ELECTRON ALPHA 8S-E features an advanced energy efficiency asset, an independent temperature ramping model, and an enhanced recipe library. Overall, TOKYO ELECTRON ALPHA-8SE diffusion furnace and accessory equipment is designed to provide high-quality fabrication of semiconductor devices while allowing manufacturers to maintain high energy efficiency and environmental compatibility. Its range of features and operational capabilities ensures precise control and excellent performance with minimal chemical waste and operational costs.
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