Used TEL / TOKYO ELECTRON Alpha 8SE #168532 for sale
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ID: 168532
LPCVD furnace, 8"
Wafer size: 8"
Flat / notch type: Flat
Signal tower: 3 color (RYG)
SMIF or I/O type: I/O type
AGV compatibility: Not use
Rapid cooling unit: Not use
Load lock system: Use
Production wafer quantity: 150
Controller and software:
HD version: V3.11
HDD capacity: Waves V3.11 R0000
TEB 408-11 HDMC
SVA 011
TEB 107 ECS5
M/C TEB 205
TEB 103 FPIF
Power: (phase, voltage, frequency)
Heater power: 3 phase, 208V, 35.6 Kva
Controller power: 1 phase, 208V, 5.5 Kva
MFC flow:
MFC1: AREA TC FC D986Y-BF, N2 20 SLM
MFC1: AREA TC FC D986Y-BF, N2 10 SLM
MFC1: AREA TC FC D986Y-BF, N2 10 SLM
MFC1: AREA TC FC D985Y-BF, SiH4 100 SCCM
MFC1: AREA TC FC D986Y-BF, N2O 5 SLM
MFM1: AREA TC FM 865Y, SiH4 100 SCCM
Heater model: VMM 40-101
Vacuum controls:
APC (CKD) control: VEC-S8-X0201
Controller specifications:
Main controller: WAVES
Temperature controller: Alpha 8SE-C
Pressure controller: None
Mecha controller: None
Burn controller: None
MFC controller: None.
TEL / TOKYO ELECTRON Alpha 8SE is a multi-purpose high-frequency diffusion furnace used for semiconductor processing and other fabrication techniques. It features an internal quartz tube, with precise temperature control and uniform heating, that allows for precise control of the processing parameters. The quartz tube is surrounded by a nitrogen-filled gas shield, providing an inert atmosphere and superior thermal insulation. The furnace is equipped with a precise frequency-control equipment, specifically designed to provide precise temperature control. This system eliminates the need for frequent manual adjustments, allowing for repeatable heating times and steady-state conditions. The unit also features a power ratio control machine that delivers high speed and accurate temperature control for uniform heat distribution. TEL ALPHA-8SE is equipped with a sample loading tool and an integrated loading/unloading station. It allows up to eight wafers or substrates to be loaded in close proximity at any one time. Additionally, the design of the sample loading asset ensures the fabrication optomechanical alignment is maintained during loading, unloading, and handling. TOKYO ELECTRON ALPHA-8 SE also offers a high-level of control over the diffusion cycle. It provides precise control of temperature ramps, time-density profiles, and cycle end-point detection. For high-load applications, it is equipped with a rapid recovery model that provides on/off modulation of the heaters to limit cycle-to-cycle variations. ALPHA 8S-E's automation feature provides an easy-to-use graphical user interface, with a suite of process monitoring tools. The equipment also monitors up to 1200 process parameters, enabling advanced process control and complete traceability of the fabrication process. TEL / TOKYO ELECTRON ALPHA 8 SE also offers several advanced accessories, such as a motorized shutter for nitrogen purging and a dry gas filter for inert gas scrubbing/separation. ALPHA 8 SE diffusion system also offers an advanced effluent abatement unit that complies with SEMI S8 and ISO14644-1 standards. This ensures the emitted air is maintained at safe and environmentally compliant levels. The furnace is also designed to be robust, reliable, and efficient, with a range of options to meet customer requirements.
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