Used TEL / TOKYO ELECTRON Alpha 8SE #9065751 for sale
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ID: 9065751
Wafer Size: 8"
Doped poly furnace, 8"
System layout type
System hand LL
Side maintenance no
System paint color white
Furnace front surface finish SUS polished #600
Process pressure 500 mTorr
Process temperature 620C
Mid temp VMM-40-101, 5 zone
NGK SH-302
Non SMIF
Process gases
Process gas 1 Pure N2
Process gas 2 SiH4
Process gas 3 5% PH3/N2
Process gas 4 0.5% PH3/N2
(4) Heater chambers
CE Marked
2003 vintage.
TEL / TOKYO ELECTRON Alpha 8SE is a diffusion furnace specifically designed for yielding precise quantities of silicon and other semiconductor materials. This 8-chamber furnace features independent temperature and gas control in each chamber, allowing for precise control over the gas flow and mass production of high-grade semiconductor materials. The rated power of each chamber is 600W and can support temperatures up to 1150°C. TEL ALPHA-8SE comes with a number of accessories that allow the user to customize their setup to best fit their needs. This includes a quartz tube, isolation rings and mesh conveyor to support a variety of wafer sizes. Additionally, TOKYO ELECTRON ALPHA-8 SE has a PC-controlled PID temperature and gas control equipment that allows for easy monitoring and precise temperature tuning. Other features include temperature uniformity of better than ±1°C and communication capabilities with peripheral devices using Ethernet protocol. TEL / TOKYO ELECTRON ALPHA 8 S E also includes its own vacuum pump to ensure proper levels of vacuum for your process. This vacuum system consists of a single-stage micro-molecular pump, a vacuum gauge, and a vacuum booster for increased pumping power. With a pumping speed of 100 liters/min, this vacuum pump is capable of rapid evacuation of the unit. Aside from the basic features, TOKYO ELECTRON Alpha 8SE is capable of offering many specialized functions to improve the user experience. For example, it has an advanced recipe controller that allows you to store up to 20 different recipes that you can call up with a single click. It also has an auto-cleaning machine that helps reduce downtime and an energy-monitoring tool that can help conserve energy. Overall, TEL / TOKYO ELECTRON ALPHA-8 SE is an excellent choice for anyone who needs precise control over temperatures and gas flows for their semiconductor materials. With its powerful output and innovative features, it's no wonder why this diffusion furnace & accessory set is so popular.
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