Used TEL / TOKYO ELECTRON Alpha 8SE #9073199 for sale
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ID: 9073199
Wafer Size: 8"
Vintage: 2002
Doped poly furnace, 8"
System Hand LL
Side Maintenance: No
System Paint Color: White
Furnace Front Surface Finish: Stainless Steel
Process Pressure: 500 mTorr
Process Temperature: 800ºC
FTP Heater: Installed
Rapid Cooling Unit: Installed
Heater Type: FTP VOS-40-017 (RT)-1000C
N2 Purge System: Installed
02 Densimeter Model: Toray LC750
SMIF: Not Installed
SMIF POD (maker/model): N/A
SMIF OEM Probe (maker/model): N/A
AGV Compatibility: Installed
Process Gases:
Process Gas 1 Pure N2
Process Gas 2 NH3
Process Gas 3 SiH2Cl2 (DCS)
Process Gas 4 N2O
Process Gas 5 SiH4
Process Gas 6 NH3
Process Gas 7 PH3 5%/He
Process Gas 8 SiCl4
Process Gas 9 H2
CE Marked
2002 vintage.
TEL / TOKYO ELECTRON Alpha 8SE is a diffusion furnace and accessory used for the production of advanced products and materials. The equipment is primarily used for the fabrication of silicon-based semiconductor devices, such as integrated circuits, transistors and other modern components. TEL ALPHA-8SE diffusion furnace aids in forming these components' intricate details and by-products for more efficient and cost-effective production. TOKYO ELECTRON ALPHA-8 SE Diffusion Furnace is a single-wafer furnace with a wide range of capabilities. It features a set of pyrometers that detect and measure the temperature within the contained wafer chamber, providing real-time adjustments to ensure consistent product quality. The system also has an up-to-date insulating unit and high-temperature resistivity, allowing the furnace to safely reach temperatures up to 1400° Celsius. This feature is further enhanced with the installation of a chemically-based cooling machine, giving the user more control and precision during the device fabrication. TEL / TOKYO ELECTRON ALPHA 8S-E also features an integrated touchscreen interface that allows users to monitor the wafer and material heating processes within the furnace. It can be programmed for any given environment and can be adapted to different facility requirements. As part of its safety measures, the tool has a pressure valve that guards against excessive pressure build-up. Additionally, TOKYO ELECTRON ALPHA 8S-E comes with a vast array of accessorized components that can be incorporated into the furnace company's fabrication process, expanding the possibilities of what the device can do. TEL ALPHA 8S-E diffusion furnace is a reliable and efficient asset that meets and exceeds modern production standards. Its advanced features provide users with the precision and detail needed for product fabrication. Additionally, it is great for more cost-effective and easier to manage materials production. This flexibility and versatility make TOKYO ELECTRON Alpha 8SE an ideal choice for many industrial facilities.
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