Used TEL / TOKYO ELECTRON Alpha 8SE #9233746 for sale
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ID: 9233746
Wafer Size: 8"
Vintage: 2008
Vertical LPCVD furnace, 8"
Process: High temp oxide
High temperature furnace
SMIF System: ASYST Indexer
Handler system: TEL / TOKYO ELECTRON Robot
Utility box
Transformer
UPS
2008 vintage.
TEL / TOKYO ELECTRON Alpha 8SE is an advanced diffusion furnace and accessories designed for advanced research and development. It is equipped with eight separate and autonomous channels with independent heating and cooling zones, making it perfect for batch processes in large research and development laboratories. TEL ALPHA-8SE features advanced controllers that allow for precise control of each zone and facilitate set-up and repeatable results. The main chamber of TOKYO ELECTRON ALPHA-8 SE is made from stainless steel and allows for up to 8 8-inch wafers to be loaded and unloaded. The chamber has integrated insulation to ensure uniform heating and cooling of substrates. The wafer loader and unloader are equipped with vacuum clamping for easy manipulation and provides an additional level of safety. Alpha 8SE is able to hold a maximum temperature of up to 1200°C for up to 2 hours and is specified for high-temperature processing. This high-temperature capability is driven by an advanced fluidized bed heat source that is efficient and capable of extremely rapid heating and cooling. The heat source also uses a graphite liner, making it resistant to corrosive gases which can be injected during processing. ALPHA 8 S E has an advanced process control system which utilizes real-time temperature and pressure sensors throughout the chamber and uses predictive algorithms to ensure the highest process accuracy. It is equipped with a seven-inch touchscreen user interface that allows the operator to control the entire process. Additionally, TOKYO ELECTRON ALPHA 8 SE is compatible with a variety of third-party applications and can be integrated with process control systems. TOKYO ELECTRON ALPHA-8SE also comes with a variety of accessories, including gas panels and an evacuation panel, which are designed to provide a complete and reliable diffusion furnace system. It is also compatible with a variety of process vessels for rapid ramp rates and full flexibility for the process. TEL / TOKYO ELECTRON ALPHA-8SE is a fully automated system and comes with built in safety sensors and protocols to ensure user safety during operation. TEL ALPHA 8S-E is an excellent diffusion furnace for large research and development laboratories. Its robust and reliable design, advanced controllers, and accessories make it the perfect choice for batch processes and advanced research and development.
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