Used TEL / TOKYO ELECTRON Alpha 8SE #9237580 for sale
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ID: 9237580
Wafer Size: 4"
Vintage: 1999
Vertical furnace, 4"
Process: CAP-SIN
Layout type: U/Box type
LL Hand
Heater type: VOS-40-017 FTP
Rapid cooling unit
TORAY LC-750 N2 Purge system
O2 Densimeter
Pressure control: CKD
SMIF Not installed (I/O Type)
Wafer transfer: 1+4 Pitch change
(21) Cassette stockers
(100) Process wafers
Power supply: 208VAC / 208VAC, 1-Ph / 3-Ph
1999 vintage.
TEL / TOKYO ELECTRON Alpha 8SE is an industrial diffusion furnace, specifically designed for advanced semiconductor device fabrication processes. It is equipped with precision temperature, pressure, and flow controllers, and offers high-speed and high-accuracy capability. TEL ALPHA-8SE is designed with ultra-low thermal drift and superior protection, ensuring safety and reliability during device fabrication processes. This model features an 8-zone cylindrical heated track that provides wide-area heating, allowing for equal heating across the entire heated area. Additionally, it features an adjustable temperature profile control, allowing the heating profile to be precisely modified to fit the materials being processed. Its large access door, optimized vents, and air-flow design also help to ensure safety and efficiency in the diffusion process. TOKYO ELECTRON ALPHA-8 SE also features a multi-step remote control, allowing for tailored control of the diffusion process from multiple points. It also includes a range of automated material transfer systems to ensure smooth and efficient loading and unloading of materials. Its low-vibration feature further simplifies the process by offering dynamic air bearings, micro-vibration sensors, and active vibration control. This reduces stress on parts during the diffusion process and reduces contamination. TOKYO ELECTRON ALPHA 8 SE is designed for compatibility with a range of accessories and consumables. These include specialised sample holders, quartz tubes, and adapters, as well as automatic charging systems, gas cylinders, and high-purity consumable accessories. This allows users to tailor their diffusion processes to ensure optimal results. Overall, TOKYO ELECTRON ALPHA-8SE is an advanced, high-performance diffusion furnace and accessories, perfect for semiconductor device fabrication. Its advanced temperature, pressure, and flow controllers, low-vibration feature, and range of automated material transfer systems ensures safety, reliability, and accuracy in the device fabrication process.
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