Used TEL / TOKYO ELECTRON Alpha 8SE #9260381 for sale

ID: 9260381
Wafer Size: 6"
Vintage: 2016
Furnace, 6" Process: HTO / TEOS Deep bay layout I-Type furnace and UP/box Furnace cabinets and Ultra-clean air flow system Scavenger and water cooling unit Main controller (WAVES) Cassette and wafer handling automation: Boat elevator Wafer counter SiC Wafer flat alignment, 6" (On I/O port) Cassette storage: 21 Gas system for DCS: HTO / TEOS Process Exhaust configuration: LP-CVD DCS-HTO, TEOS Mid temperature heater: 8" Heating element N2 Load lock system Maintenance jig UPS Ingenuity connection 2016 vintage.
TEL / TOKYO ELECTRON Alpha 8SE diffusion furnace is a state-of-the-art semiconductor fabrication equipment used for the manufacture and control of semiconductor materials and devices. The furnace is designed for a wide range of critical and high-variety diffusion processes which require precise control over the temperature and atmosphere. This advanced equipment is ideal for both experimentation and production of semiconductor components due to its ability to uniformly process wafers of different sizes and shapes and its superior repeatability. The furnace is constructed using a pair of airtight stainless steel chambers, each with its own independently-controlled temperature and atmosphere. This allows for uniform processing of multiple substrates within the same process while maintaining total control over the diffusion temperatures. Within the chamber, a pair of inductive coils is able to precisely heat the wafers to a desired temperature level and sustain a stable diffusion environment. The environment can be maintained by either the ambient atmosphere or an inert gas, depending upon the type of diffusion process being conducted. The furnace has a built-in control system which allows operators to point-to-point adjust the temperature within the chamber for each wafer for increased accuracy. Operators can also program the temperature profile to move with the diffusion temperature, allowing for a uniform and repeatable result. The high-quality insulation material used in the furnace not only reduces heat loss but also maintains the temperature stability and uniformity throughout the entire chamber. In addition to its high-performance features, TEL ALPHA-8SE comes with a range of accessories to further enhance its capabilities to meet customer needs. These include an automated loading and unloading system, a nitrogen source, and a digital charger unit. This diffusion furnace is suitable for a wide range of diffusion processes ranging from low temperature applications to high temperature processes. TOKYO ELECTRON ALPHA-8 SE diffusion furnace is a powerful and versatile tool for manufacturing and testing of semiconductor components. Its state-of-the-art design ensures that the highest quality results are consistently and reliably produced with total control over the temperature and atmosphere. The range of accessories available for this device allows for further customisation, making it an ideal choice for those working in industry and research.
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