Used TEL / TOKYO ELECTRON Alpha 8SE #9282682 for sale

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TEL / TOKYO ELECTRON Alpha 8SE
Sold
ID: 9282682
Vintage: 2007
Pyro furnace Process: LPRO 2007 vintage.
TEL / TOKYO ELECTRON Alpha 8SE is a multi-functional diffusion furnace equipment designed for semiconductor device fabrication. TEL ALPHA-8SE is capable of both low and high temperature processes, with a range of 1000°C to 2200°C. It is equipped with state-of-the-art technologies, such as divertor-type monitors, proximity sensors, and automatic remote switching capabilities. TOKYO ELECTRON ALPHA-8 SE includes a quartz and ceramic reaction tube for maximum process uniformity and temperature homogeneity, allowing for better wafer uniformity and improved yield throughout the process. Its low and high temperature process functions, along with its unique high temperature gallium arsenide process capability, enable device manufacturers to achieve optimum results with a variety of semiconductor processes. TOKYO ELECTRON ALPHA 8 S E also features an advanced exhaust system which can be configured for up to three rollers for optimal process uniformity and temperature homogeneity during multi-step processes. Its advanced real-time diagnostic monitoring capabilities allow for precise control of the unit's parameters at any given time, resulting in better wafer uniformity and improved yield. TEL ALPHA 8 S E's quick-start capability ensures robust process monitoring and high throughput, thereby reducing setup and process times. It is also equipped with an automatic gas line input, in addition to its dual-tube-machine configuration, making it ideal for multi-step processes. It is designed with an automated temperature-control cup which ensures precise temperature within the chamber, as well as precise regulation of the water temperature of the wafer holders. TEL ALPHA-8 SE is also equipped with a number of features that make it easy to use for a variety of applications, such as its operation-monitoring tool which provides process visualization and the capability to make real-time modifications easily. Its automatic remote switching capabilities enable simultaneous connection of multiple diffusion tools and enable easy switching between the different tools. An intuitive graphical user interface (GUI) is included to enable simplified operation of the asset. In addition, Alpha 8SE is designed with a number of safety features to ensure proper operation, such as overcurrent protectors, emergency stop buttons, water pressure rupture detector, and a high-temperature coolant model. It is also equipped with a remote interlock for isolation of individual lines, allowing for operation of multiple processors without the risk of accidental cross contamination. All in all, ALPHA 8S-E is a robust and versatile diffusion furnace equipment which is perfect for a variety of semiconductor device manufacturing applications. Its advanced features make it suited for research and development, as well as mass production purposes.
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