Used TEL / TOKYO ELECTRON Alpha 8SE #93405 for sale
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ID: 93405
Wafer Size: 8"
Vintage: 2002
APCVD furnace, 8"
Heater Model/Part No: VOS-40-017
Process: PIX Cure
Software Version: WAVE Controller
System Power Rating: 110AC One Phase / 208 AC
Loading Configuration 4 Loader
N2 LL
150 Wafer Load
Main System:
WAVES Controller
Photohelic Gauge
Boat Elevator
Wafer Load Automation
21 Cassette Stocker
Temperature Controller (M560)
Furnace Monitor, Power Control Unit
Remote Utility&Gas Cabinet
Inner T/C for Ration Mix
O2 Detector
Auto Shutter
Gas System (SiH4,CLF3,5%PH3,O2,N2,)
Options:
Signal Tower
Pitch Change Mechanism
UPS
GEM Communication
N2 Load Lock Ambient Control:
Quartz ware
Load lock purge system
Process gas O2,N2,
Gas Type - Convention Gas System
Tubing material - Stainless steel
Tubing Finish - Electro-polish
Manual valve - Fujikin
Fitting Type - VCR/UJR
Air-Operated valve - Fujikin
Filter - Millipore
Regulator - Veriflo
MFC - Aera
Pressure transducer - Millipore or NAGANO
Remote Components:
UTILITY BOX x1. Power Rating: 110/208AC
RCU cabinet x1 Power Rating: 110/208V
UPS x1. Power Rating: 110AC-1
Crated in a warehouse
2002 vintage.
TEL / TOKYO ELECTRON Alpha 8SE is a diffusion furnace and accessory that provides high-efficiency, low cost production of electronic components. It can be integrated into existing production lines and is easy to use with its automated loading, temperature control and closed equipment technology. The furnace utilizes a closed-ended gas delivery system and is built with a powerful vertical and horizontal gas delivery unit, giving it a maximum temperature of up to 1600°C. Due to the strong construction of TEL ALPHA-8SE, it has a very long life cycle and is suitable for performing long tasks that require high temperatures. The furnace can also work in a high volume environment as it is able to hold up to 10 gas sources simultaneously. TOKYO ELECTRON ALPHA-8 SE also contains a water cooling machine which makes it safe to use in humid or wet environments. This tool also helps to ensure stable temperatures for faster cooling and heat distribution. On top of that, it can reach a maximum leakage level of 0.5% with pure nitrogen, preventing oxidation in the final products. Moreover, TEL / TOKYO ELECTRON ALPHA 8 S E is equipped with a unique set of variable controls which are easily adjusted with just one touch, allowing operators to adjust settings according to different production needs. The furnace also has other options such as multi-zone temperature control, variable gas flow and a pre-pay check feature to assist in systematic production. TEL Alpha 8SE is an efficient and reliable diffusion furnace asset that is perfect for high-volume production. With its automated loading, temperature control and closed model technology, ALPHA-8SE is the perfect choice for anyone looking for a complete diffusion furnace and accessory solution for their next production line.
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