Used TEL / TOKYO ELECTRON H-LP #9137193 for sale

TEL / TOKYO ELECTRON H-LP is a diffusion furnace that is specifically designed to deliver precise thermal processes and maintain cleanroom conditions. This furnace's purpose is to mass produce microelectronic components by providing an annealing treatment that is necessary in semiconductor production processes. It can also be used to uniformly manufacture a large number of substrates using various thermal processes, such as oxidation, epitaxy, and alloying. TEL H-LP diffusion furnace is composed of three major components: the thermal cycle equipment, the robot transfer equipment, and the automated control software. The thermal cycle equipment is responsible for controlling the thermal process through heating and cooling. It is specifically designed to hold up to 3 modules in a simultaneous, efficient manner. The robot transfer system is responsible for automatically retrieving and placing substrates into the furnace in a cleanroom environment. The automated control software is designed to monitor and streamline production processes by adjusting parameters in real time. TOKYO ELECTRON H-LP diffusion furnace offers a variety of features to enhance the accuracy and efficiency of thermal processes. For example, its unique forced cooling unit utilizes air from the fixed mount type blower that controls the temperature fluctuations while ensuring no room material contamination. Additionally, its automatic servo machine is equipped with a wireless remote controller that allows users to adjust and fine tune the process from a secure distance. Additionally, the heater chain is specifically designed to work with an optimized PID control algorithm, ensuring a uniform heating temperature across the entire chamber. Additionally, H-LP diffusion furnace is equipped with various safety features. Its anti-tilt structure ensures that the tool remains stable and does not vibrate or shift during processing. It also features an advanced 24-hour safety monitoring asset that tracks the condition of the equipment and alert operators in the event of any issues. Additionally, the auto-filling coolant devices ensure that the necessary coolant is supplied during critical times to prevent the furnace from reaching high temperatures that could lead to over heating. Overall, TEL / TOKYO ELECTRON H-LP diffusion furnace is an excellent choice for precise thermal processing in cleanroom environments. This versatile machine offers a number of features to maximize accuracy and efficiency while enhancing safety. Its unique design, combined with convenient accessories, make it an invaluable tool for various microelectronic production processes.