Used TEL / TOKYO ELECTRON Indy-I-LVPCKNR #9381856 for sale
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ID: 9381856
Wafer Size: 12"
Vintage: 2007
Furnace, 12"
Process: MID-SiN(LT-SiN)
Heater type: Mid-temperature VCM-50-012L
Gases: N2, P-N2, NH3, SiH2CI2, HF, 20% F2/N2
Hard Disk Drive (HDD)
2007 vintage.
TEL / TOKYO ELECTRON Indy-I-LVPCKNR is a diffusion furnace and accessories equipment designed for the precision fabrication of microelectronic devices. This advanced system is engineered with multi-layer crystalline films, thermally stable process, and a high degree of control over temperature and flow enabling micro fabrication. This unit is suitable for various processes used in creating new materials or structures. TEL Indy-I-LVPCKNR features several components including a crucible for holding the material to be processed, a heater, a flowmeter, a gas source, a vacuum machine, and an exhaust tool. The crucible is milled from a high-grade stainless steel and has a platinum alloy lining with a built-in RF heater. The crucible is designed to provide an extremely stable temperature throughout the process and allows for the precise control of both temperature and space for material processes. The built-in RF heater allows for faster heating cycles that create greater throughput. The heater is used to achieve the desired temperature, typically between 850 and 800 Celsius. The heater is made of high temperature alloy and has an adjustable cooling asset to maintain the desired temperature. The gas source and flowmeter allow for the introduction of a variety of gasses for processing, depending on the application. For example, nitrogen gas may be used for oxidation and annealing processes while forming gas may be used forDeposition1ing materials. The vacuum model helps to ensure that the chamber and materials remain free of contaminants during the process. TOKYO ELECTRON Indy-I-LVPCKNR also features several safety features, such as a low temperature sensor, a pressure switch to detect overpressure in the chamber, and a power-failure indicator. These safety features help ensure the safety and reliability of the equipment during use. The exhaust system collects and dissipates contaminants, while also evacuating the chamber during cool-down. Indy-I-LVPCKNR has been designed for maximum efficiency and accuracy. It enables faster production cycles and higher yields due to the accuracy of the process parameters, which are kept under control due to the unit's design and safety features. With its multi-layer crystalline films, thermally-stable process, and precise control, this machine is a great choice for the precision fabrication of microelectronic devices.
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