Used TEL / TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI #9381811 for sale

ID: 9381811
Wafer Size: 12"
Vintage: 2012
Furnace, 12" Process: HFSiOX Rapid cooling unit Pump box VMM-56-201 Heater FUJIKIN Air valve MFC, MFM: AERA MAIN / APC: CKD Load lock system GFC Display Load port: Side FFU FIMS Port Heater type: VMM-56-201 Low temp (4) Zones: 150°C~600°C Furnace subsystem: Automation system Heater Process chamber Temperature controller Scavenger Cooling water unit Gas subsystem: Gas supply unit Exhaust Vacuum line Gas: PN2 N2 Ar O3 3-DMASi (Liquid) H2O and TDMAH (Source tank) Missing Parts: QUARTZ Wares (2) Hard Disk Drives (HDD) Power supply: 3 Phase, AC 480 V, Single phase, AC 120 V 2012 vintage.
TEL / TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI is a diffusion furnace and an accompanying set of accessories. This furnace is designed to provide advanced semiconductor device processing for a variety of applications. TEL Indy Plus-B-MVCKNNRRTXI is a high-temperature, high-purity, horizontal diffusion furnace. The furnace is capable of reaching temperatures up to 1,730 degrees Celsius. It is built with a three-zone design to ensure uniform temperature during the diffusion process. The furnace uses an independent source of inert gas to ensure a clean and safe environment for the device during processing. The accompanying accessories are designed to provide a complete diffusion processing solution. The accessories include an electron cyclotron resonance plasma source, a TCA (thermoelectric cooling assembly), an autosampler for loading wafers, a loadport with automated wafer transfer equipment, and a high vacuum system. TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI includes several features to maximize the efficiency of the diffusion process. The furnace features auto-tune functionality to minimize setup time, a monitoring unit for monitoring process parameters, and a powerful data acquisition machine with graphical user interface. Indy Plus-B-MVCKNNRRTXI is a reliable, safe and easy to use tool for a wide range of process requirements. Its key features make it a great choice for advanced device processing. The furnace and accessories are reliable and low-maintenance, and are designed to provide a long service life. This fused silica process tube provides superior thermal insulation to ensure consistent and uniform temperatures during the diffusion process. This powerful diffusion furnace and accessory set provides users with a comprehensive solution for advanced device processing applications. TEL / TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI is designed to meet the most stringent demands of the semiconductor device processing industry.
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